論文

• Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone. Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices, Microelectronic Engineering, Vol. 187-188, pp. 105-109, Apr. 2018.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu. LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY, Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), IEEE Conference Publications, pp. 2187 - 2190, Aug. 2017.
• Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers, Microelectronics Engineering, Vol. 153, pp. 90-93, Apr. 2016.

著書

• Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone. Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors, Advances in Microelectronics Reviews, IFSA Publishing, Vol. 2, pp. 23-48, Feb. 2019.  公式リンク  

国際会議発表 (査読有り)

• Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone. Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End, 43rd International Conference on Micro & Nano Engineering (MNE2017), MNE2017, Sept. 2017.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu. Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology, The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), pp. 2187-2190, June 2017.  公式リンク  
  
• Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone. FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices, 21th International Conference on Solid State Ionics, June 2017.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu. Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices, 29th International Microprocesses and Nanotechnology Conference (MNC 2016), pp. 10D-5-1, Nov. 2016.  公式リンク  
  
• Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating, ISE - Topical Meeting, ISE - Topical Meeting, Apr. 2016.
• Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices, SSDM2015, 2015 International Conference on Solid State Devises and Materials, SSDM2015, 2015 International Conference on Solid State Devises and Materials, pp. 52-53, Sept. 2015.
• Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida. A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology, 25th Advanced Metallization Conference Asian Session (ADMETAplus2015), Sept. 2015.
• Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida. A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology, AMC2015, Advanced Metallization Conference, AMC2015, Sept. 2015.
• Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers, MNE2015, The 41th International Conference on Micro and Nano Engineering, MNE2015, The 41th International Conference on Micro and Nano Engineering, pp. Wed-C-p81, Sept. 2015.
• Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Masaki Yano, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone. Stability of Movable Structure Formed by Au Electroplating for MEMS Devices, ICMAT2015 & IUMRS-ICA2015,, ICMAT2015 & IUMRS-ICA2015,, June 2015.

国内会議発表 (査読有り)

• 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉. 積層メタルMEMS慣性センサの長期振動特性評価, 第9回集積化MEMSシンポジウム, Oct. 2017.  公式リンク  
  
• 寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 山根大輔, 益一哉, 曽根正人, 小西敏文, 町田克之, 年吉洋. 電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価, 第３３回「センサ・マイクロマシンと応用システム」シンポジウム, 第３３回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016.
• 寺西 美波, TSO-FU MARK CHANG, 陳 君怡, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人. 電解金めっきで作製したTi/Au微小カンチレバーの構造安定性, 第63回応用物理学会春季学術講演会, 第63回応用物理学会春季学術講演会, Mar. 2016.

国内会議発表 (査読なし・不明)

• 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉. 金めっきで形成したMEMS加速度センサの長期振動特性に関する検討, 第78回 応用物理学会 秋季学術講演会, Sept. 2017.  公式リンク  
  
• 山根 大輔, 小西 敏文, 佐布 晃昭, 中島 英亮, 寺西 美波, 陳 君怡, Chang Tso-Fu Mark, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之. 積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）, 応用物理学会 2017年春季講演会, 応用物理学会 2017年春季講演会, p. 14p-P3-14, Mar. 2017.
• 寺西美波, Tso-Fu Mark Chang, 小西敏文, 松島隆明, 町田克之, 年吉 洋, 山根大輔, 伊藤浩之, 益 一哉, 曽根正人. 電解金めっきで作製したMEMSデバイスにおける動作構造安定性, 応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ, p. 7, July 2015.
• 寺西美波, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 年吉 洋, 町田克之, 益 一哉, 曽根正人. 電解金めっきで作製した微小カンチレバーの形状安定性評価, 平成27年電気学会センサ・マイクロマシン部門総合研究会, pp. 15-18, July 2015.  公式リンク  
  

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