論文

• Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test, Microelectronic Engineering, Vol. 215, pp. 111001, May 2019.
• Koichiro Tachibana, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test, Microelectronic Engineering, Volume 207, pp. 33-36, Jan. 2019.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu. LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY, Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), IEEE Conference Publications, pp. 2187 - 2190, Aug. 2017.

国際会議発表 (査読有り)

• Tomoyuki Kurioka, Koichiro Tachibana, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Daisuke Yamane, Hiroyuki Ito, Katsuyuki. Machida, Yoshihiro Miyake, Masato Sone. Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests, NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS, Sept. 2022.
• Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyotaro Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone. Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test, 44rd International Conference on Micro & Nano Engineering (MNE2018), 44rd International Conference on Micro & Nano Engineering (MNE2018), Sept. 2018.
• Kyotaro Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone. Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever, 44rd International Conference on Micro & Nano Engineering (MNE2018), 44rd International Conference on Micro & Nano Engineering (MNE2018), Sept. 2018.
• Kyotaro Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone. Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components, The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan, Nano Engineering and Microsystem Technology Conference, Taiwan, June 2018.
• Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyoutarou Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone. Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test, The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan, Nano Engineering and Microsystem Technology Conference, Taiwan, June 2018.
• Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone. Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices, 233rd ECS Meeting, 233rd ECS Meeting, May 2018.
• Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone. Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components, IUMRS International Conference in Asia (IUMRS-ICA) 2017, Nov. 2017.
• Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone. Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology, 2017 MRS Fall Meeting, Nov. 2017.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu. Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology, The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), pp. 2187-2190, June 2017.  公式リンク  
  

国内会議発表 (査読有り)

• 新⽥ 京太朗, 橘 航⼀朗, TangHao-Chun, Chun-Yi Chen, Tso-Fu Mark Chang, ⼭根 ⼤輔, 小西敏文, 町⽥ 克之, 益 ⼀哉, 曽根 正⼈. ⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性, 応用物理学会第６５回春季講演会, 応用物理学会第65回春季講演会, Mar. 2018.
• 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉. 積層メタルMEMS慣性センサの長期振動特性評価, 第9回集積化MEMSシンポジウム, Oct. 2017.  公式リンク  
  

国内会議発表 (査読なし・不明)

• 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉. 金めっきで形成したMEMS加速度センサの長期振動特性に関する検討, 第78回 応用物理学会 秋季学術講演会, Sept. 2017.  公式リンク  
  
• 橘 航一朗, Chang Tso-Fu Mark, Chen Chun-Yi, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人. 積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討, 応用物理学会 2017年春季講演会, 応用物理学会 2017年春季講演会, p. 14p-P3-12, Mar. 2017.

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