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Publication List - Ken Atsumi (11 entries)
- 2012
- 2011
- 2010
- 2009
- 2008
- All
Journal Paper
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Ken Atsumi,
Shota Otobe,
Tatsuya Koga,
Takashi Ichikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers,
Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019),
IEEE Conference Paper,
IEEE,
May 2019.
Official location
International Conference (Reviewed)
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Takashi Ichikawa,
Ken Atsumi,
Tatsuya Koga,
Daisuke Yamane,
Shin-ichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes,
Design, Test, Integration & Packaging of MEMS/MOEMS,
June 2020.
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Daisuke Yamane,
Shota Otobe,
Ken Atsumi,
Tatsuya Koga,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS,
32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019),
pp. 684-687,
Jan. 2019.
Official location
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Shota Otobe,
Tatsuya Koga,
Ken Atsumi,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shin-ichi Iida,
Hiroyuki. Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes,
31st International Microprocesses and Nanotechnology Conference (MNC2018),
Nov. 2018.
Domestic Conference (Reviewed)
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Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
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Ken Atsumi,
Shouta Otobe,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術によるピラー型容量検出電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
Domestic Conference (Not reviewed / Unknown)
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Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討,
第81回 応用物理学会秋季学術講演会,
Sept. 2020.
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Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
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Ken Atsumi,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
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Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3Dピラー型Au錘MEMS加速度センサ,
第36回「センサ・マイクロマシンと応用システム」シンポジウム,
19am3-PS3-21,
Nov. 2019.
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Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2),
第80回応用物理学会秋季学術講演会,
Sept. 2019.
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