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Publication List - Katsuyuki Machida 2022 (13 / 428 entries)
Journal Paper
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Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Katsuyuki Machida,
Parthojit Chakraborty,
Shin-ichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure,
IEEE Sensors Journal,
Vol. 22,
Issue 15,
June 2022.
Official location
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Akira Onishi,
Kohei Shibata,
Akihiro Uchiyama,
Katsuyuki Machida,
Taiki Ogata,
Noboru Ishihara,
Hirotaka Uchitomi,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement,
Japanese Journal of Applied Physics,
Vol. 61,
p. SD1028,
Mar. 2022.
Official location
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression,
Surface & Coatings Technology,
Elsevier,
Vol. 436,
p. 128315,
Feb. 2022.
Official location
International Conference (Reviewed)
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Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
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Masato Sone,
Hitomi Watanabe,
Kyotaro Nitta,
Hideaki Nakajima,
Tomoyuki Kurioka,
Chun-Yi Chen,
Parthojit Chakraborty,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki. Machida,
Yoshihiro Miyake,
Tso-Fu Mark Chang.
A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer,
NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS,
Sept. 2022.
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Tomoyuki Kurioka,
Koichiro Tachibana,
Kyotaro Nitta,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki. Machida,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests,
NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS,
Sept. 2022.
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Taro Omura,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
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Takumi Akiyama,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
Domestic Conference (Reviewed)
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Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Shinichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure,
第83回応用物理学会秋季学術講演会,
第83回応用物理学会秋季学術講演会,
22a-A406-2,
Sept. 2022.
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Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Shinichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer,
第13回集積化MEMS技術研究ワークショップ,
Aug. 2022.
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Takumi Akiyama,
Yu-An Chien,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価,
2022年応⽤物理学会春季講演会,
Mar. 2022.
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Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
Au単結晶の微⼩カンチレバーの機械的特性における断⾯形状依存性,
2022年応⽤物理学会春季講演会,
Mar. 2022.
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Taro Omura,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
⾦めっき材料における機械的特性の電流密度依存性,
2022年応⽤物理学会春季講演会,
Mar. 2022.
Patent
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