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Publication List - Yuki Hirata 2015 (7 / 250 entries)
Journal Paper
International Conference (Not reviewed / Unknown)
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Junho Choi,
Hayato Shimozono,
Yuki Hirata,
Setsuo Nakao,
Haruyuki Yasui.
UV Raman Study of a-C:H Films Deposited on Trench Sidewall,
第25 回日本MRS 年次大会,
第25 回日本MRS 年次大会 予稿集,
Dec. 2015.
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Yuki Hirata,
Junho Choi.
Deposition of a-C:H film on inner surface of microchannel,
第25 回日本MRS 年次大会,
第25 回日本MRS 年次大会 予稿集,
Dec. 2015.
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Yuki Hirata,
Junho Choi.
Deposition of a-C:H film on inner surface of High-Aspect-Ratio Microchannel,
4th Nano Today Conference,
Abstracts of 4th Nano Today Conference,
Dec. 2015.
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Yuki Hirata,
Yuya Nakahara,
Keisuke Nagato,
Takahisa Kato,
Junho Choi.
Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography,
International Tribology Conference, Tokyo 2015,
Proceedings of International Tribology Conference, Tokyo 2015,
Sept. 2015.
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Yuki Hirata,
Junho Choi.
Structural and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis,
International Tribology Conference, Tokyo 2015,
Proceedings of International Tribology Conference, Tokyo 2015,
Sept. 2015.
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