International Conference (Reviewed)

• Wentao He, Tetsuji Kiyota, Kenta Doi, Tomomitsu Ozeki, Atsusi Nezu, Hiroshi Akatsuka. Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy, The 14th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2025), Program Book of AEPSE2025, International Scientific Committee ofAEPSE2025, p. 81, Nov. 2025.  Official location  
• Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Kazuki Shimatani, Hinata Hanyu, Ayaki Sakurai, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka. Effects of Bias Power on EEPFs near the Substrate in Argon ICP Measured by a Langmuir Probe, The 46th International Symposium on Dry Process (DPS2025), Proc. DPS2025, Division of Plasma Electronics, Japan Society of Applied Physics, Nov. 2025.  Official location  

International Conference (Not reviewed / Unknown)

• Kazuki Shimatani, Tetsuji Kiyota, Kenta Doi, Yuya Yamashita, Wataru Kikuchi, Kenta Ishi, Yuchen Ye, Ayaki Sakurai, Atsushi Nezu, Hiroshi Akatsuka. Spatial distribution measurement of electron temperature and density of inductively coupled nitrogen plasma by tomographic optical emission spectroscopy, The 78th Annual Gaseous Electronics Conference (GEC2025), Bull. American Phys. Soc., Oct. 2025.  Official location  
• He Wentao, Tetsuji Kiyota, Kenta Doi, Yuya Yamashita, Wataru Kikuchi, Shuhei Watanabe, Ayaki Sakurai, Yuchen Ye, Kazuki Shimatani, Atsushi Nezu, Hiroshi Akatsuka. Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis, The 78th Annual Gaseous Electronics Conference (GEC2025), Bull. American Phys. Soc., Americal Physical Society, Oct. 2025.  Official location  
• Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Wataru Kikuchi, Kazuki Shimatani, Hinata Hanyu, Wentao He, Ayaki Sakurai, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka. Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects, The 78th Annual Gaseous Electronics Conference (GEC2025), Bull. American Phys. Soc., Americal Physical Society, Oct. 2025.  Official location  

Domestic Conference (Not reviewed / Unknown)

• Wentao He, Tetsuji Kiyota, Kenta Doi, Hirotoshi Nakao, Tomomitsu Ozeki, Kazuhiro Naiki, Kangbai Li, Shun-ichiro Ohmi, Hiroshi Akatsuka. Spatially resolved measurements of reduced-pressure oxygen ICP by tomographic emission spectroscopy, The 86th JSAP Autumn Meeting 2025, Extended Abstracts of the 86th JSAP Autumn Meeting 2025, Japan Society of Applied Physics, 08-111, Aug. 2025.  Official location  
• Koki Fukumoto, Kenta Doi, Tetsuji Kiyota, Yuya Yamashita, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka. Spatially averaged spectroscopic measurements of low-pressure argon plasmas and their relationship to local electron temperature and density, The 86th JSAP Autumn Meeting 2025, Extended Abstracts of the 86th JSAP Autumn Meeting 2025, Japan Society of Applied Physics, 08-112, Aug. 2025.  Official location  
• Shigeki Nakagawa, Ryo Yokozawa, Daisuke Iida, yota Takamura, Yutaka Nakamitsu, Tetsuji Kiyota. Analysis of growth mechanism using in-situ observation of internal stress during sputter-deposition of W films, The 72nd JSAP Spring Meeting 2025, 16p-K504-10, Mar. 2025.

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