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山田淳三郎 2008年 研究業績一覧 (8件 / 20件)
国際会議発表 (査読有り)
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Eiki Hotta,
Nozomu Kishi,
Junzaburo Yamada,
Qiushi Zhu,
Tomonao Hosokai,
Masato Watanabe,
Akitoshi Okino.
Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source,
2008 International Symposium on Extreme Ultraviolet Lithography,
26,
Oct. 2008.
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Osamu Sakuchi,
Fei Jiang,
Junzaburo Yamada,
Qiushi Zhu,
Masato Watanabe,
Tohru Kawamura,
Akitoshi Okino,
Kazuhiko Horioka,
Eiki Hotta.
Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography,
14th International Congress on Plasma Physics,
ICPP2008 Abstracts,
JSPF,
FG-P3-079,
p. 349,
Sept. 2008.
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Masato Watanabe,
Junzaburo Yamada,
Qiushi Zhu,
Eiki Hotta.
Development of Extreme Ultraviolet Radiation Source using Laser Triggered Vacuum Spark Discharge Plasma,
7th International Conference on Dense Z-pinches (DZP 2008),
APS,
Aug. 2008.
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Masato Watanabe,
Nozomu Kishi,
Junzaburo Yamada,
Osamu Sakuchi,
Jiang Fei,
Zhu Qiushi,
Akitoshi Okino,
Kazuhiko Horioka,
Eiki Hotta.
Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source,
The 35th IEEE International Conference on Plasma Science,
IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science,
IEEE,
1P67,
p. 170,
June 2008.
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Qiushi Zhu,
Junzaburo Yamada,
Nozomu Kishi,
Masato Watanabe,
Akitoshi Okino,
Eiki Hotta.
EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma,
2008 International Workshop on EUV Lithography,
SPIE,
June 2008.
国内会議発表 (査読有り)
国際会議発表 (査読なし・不明)
国内会議発表 (査読なし・不明)
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山田 淳三郎,
ズ キュシ,
岸 望,
渡邊 正人,
MASNAVI MAJID,
沖野 晃俊,
河村 徹,
堀岡 一彦,
堀田 栄喜.
レーザトリガ型Sn EUV放電光源の開発,
パルスパワー・放電合同研究会,
電気学会パルスパワー・放電合同研究会資料,
電気学会,
PPT-08-22/ED-08-51,
pp. 37-42,
May 2008.
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