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Publication List - Kazuya Masu 2021 (21 / 1030 entries)
Journal Paper
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Hiroyuki Ito,
Katsuyuki Machida,
Noboru Ishihara,
Yoshihiro Miyake,
Kazuya Masu.
A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds,
ECS Transactions,
Vol. 104,
No. 4,
pp. 83-91,
Oct. 2021.
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Hitomi Watanabe,
Tso-Fu Mark Chang,
Michael Schneider,
Ulrich Schmid,
Chun-Yi Chen,
Shinichi Iida,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency,
Electrochem,
MDPI,
Vol. 2,
pp. 216-223,
Apr. 2021.
Official location
Book
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Tso-Fu Mark Chang,
Hideaki Nakajima,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi,
Masato Sone.
Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers,
Advances in Microelectronics: Reviews,
IFSA PUBLISHING, S.L.,
Vol. 3,
Apr. 2021.
International Conference (Reviewed)
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Yu-An Chien,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics,
The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021),
Dec. 2021.
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Kazuya Fujita,
Kosuke Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
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Takumi Akiyama,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
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Takumi Akiyama,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
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Kazuya Fujita,
Kosuke Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
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Akihiro Uchiyama,
Takasi Ichikawa,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
A MEMS accelerometer with a single axis two proof masses for a wide detection range,
Transducers,
June 2021.
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Takasi Ichikawa,
Akihiro Uchiyama,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer,
Inertial,
Mar. 2021.
Domestic Conference (Reviewed)
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藤田 一矢,
鈴木 康介,
Chun-Yi Chen,
Tso-Fu Mark Chang,
山根 大輔,
伊藤 浩之,
町田 克之,
益 一哉,
曽根 正人.
金単結晶微小カンチレバーの機械的特性とサンプル形状効果,
第82回応用物理学会秋季学術講演会,
第82回応用物理学会秋季学術講演会,
Sept. 2021.
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Masato Sone,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu.
医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価,
日本金属学会 2021年春季講演大会,
日本金属学会 2021年春季講演大会,
Mar. 2021.
Domestic Conference (Not reviewed / Unknown)
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Akihiro Uchiyama,
Kohei Shibata,
Akira Onishi,
Takasi Ichikawa,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
ワイドレンジAu錘1軸MEMS加速度センサの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
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Akira Onishi,
Akihiro Uchiyama,
Kohei Shibata,
Takasi Ichikawa,
Sangyeop Lee,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
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Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Sangyeop Lee,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Ito.
Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
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Akira Onishi,
Akihiro Uchiyama,
Kohei Shibata,
Takasi Itikawa,
Sangyeop Lee,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討,
第82回 応用物理学会秋季学術講演会,
Sept. 2021.
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Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討,
令和3年度E部門総合研究会,
July 2021.
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Takasi Itikawa,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討,
令和2年度E部門総合研究会,
July 2021.
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Akihiro Uchiyama,
Takasi Ichikawa,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討,
応用物理学会春季学術講演会,
Mar. 2021.
Patent
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