Journal Paper

• Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Annealing effects on effective Young’s modulus of Ti/Au multi-layered microcantilevers, Micro and Nano Engineering, Vol. 32, pp. 100367-100367, June 2026.  Official location  
• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage, Japanese Journal of Applied Physics, Vol. 65, Number 5, Mar. 2026.  Official location  
• Wending Hou, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Tso-Fu Mark Chang, Masato Sone. Effect of Supercritical Carbon Dioxide Emulsification on Nickel Electroplating in Sulfamate Baths at Various CO₂ Volume Fractions, Journal of The Electrochemical Society, Journal of The Electrochemical Society, Vol. 173, Number 3, Jan. 2026.  Official location  

International Conference (Reviewed)

• Masako Okumura, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Layer-Structure Effects on Warpage Behaviors of Proof-Masses with Ti/Au Multi-Layered Structures toward MEMS Capacitive Accelerometers, The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken), Sept. 2026.
• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Gen Hikosaka, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications, The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken), Sept. 2026.
• Nobutaka Toake, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Effect of Annealing on the Micro-Mechanical Properties of Gold Micro-cantilevers with Ti/Au Multi-layered Structures, The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken), Sept. 2026.
• Masato Sone, Tomoyuki Kurioka, Gen Hikosaka, Tso-Fu Mark Chang, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Design Strategy for Material Properties of Multi-layered Ti/Au Micro-components by Electrodeposition Towards Ultra-high Sensitive MEMS Inertial Sensors, The 9th International Conference on Material Strength and Applied Mechanics (MSAM 2026), The 9th International Conference on Material Strength and Applied Mechanics (MSAM 2026), July 2026.
• Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Katsuyuki Machida, Tso-Fu Mark Chang, Chun-Yi Chen, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. Miniaturization of High-Sensitivity Gold Single-axis MEMS Accelerometer by Adjusting Spring Constant and Hole Size of Perforated Proof-mass, APCOT 2026, APCOT 2026, June 2026.
• Chihaya Mukaide, Torauto Yamada, Tomoyuki Kurioka, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer and Its Application, APCOT 2026, APCOT 2026, June 2026.
• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chang Tso-Fu Mark, Chen Chun-Yi, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer, APCOT 2026, APCOT 2026, June 2026.
• Torauto Yamada, Chihaya Mukaide, Hisashi Takahata, Tomoyuki Kurioka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures, IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems, IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems, May 2026.

Domestic Conference (Reviewed)

• Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. 長期振動試験によるAu錘1軸MEMS加速度センサの耐久性評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• 坂梨 航太, Tomoyuki Kurioka, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. MEMSデバイス作製のための 電解めっき膜制御に向けたパターン密度の検討, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Chihaya Mukaide, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Katsuyuki Machida, Masato Sone. 円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Nobutaka Toake, Tomoyuki Kurioka, Shota Iima, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Ti 板上の電解金めっき膜の機械特性に対するアニーリング処理の影響, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Chihaya Mukaide, Torauto Yamada, Tomoyuki Kurioka, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. ワイドレンジAu錘1軸MEMS加速度センサにおける検出範囲の検討, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.

Patent

• Ludovico Minati, Tn Aravind, Hiroyuki Ito, Shiro Dosho, Aran Hagihara, Jim Bartels. 高調波分析に基づく無線用パワーアンプの非線形歪み補償システム. Patent. Registered. 国立大学法人東京科学大学. 2022/10/19. 特願2025-512776. 特許第7811059号. 2026/01/27 2026.

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