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Publication List - Katsuyuki Machida 2014 (35 / 427 entries)
Journal Paper
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Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
Integrated CMOS-MEMS Technology and Its Applications,
ECS Transactions,
The Electrochemical Society,
volume 61,
no. 6,
pp. 21-39,
May 2014.
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Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology,
Japanese Journal of Applied Physics,
vol. 53,
pp. 04EE15.1-7,
Mar. 2014.
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Kazuya Masu.
Design of sub-1g microelectromechanical systems accelerometers,
Applied Physics Letters,
Vol. 104,
No. 7,
pp. 74102,
Feb. 2014.
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Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology,
Japanese Journal of Applied Physics,
Vol. 53,
pp. 27202,
Jan. 2014.
International Conference (Reviewed)
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A 1mG-to-20G Integrated MEMS Inertial Sensor,
IEEE SENSORS 2014,
pp. 1591-1594,
Nov. 2014.
Official location
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Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology,
27th Int. Microprocesses and Nanotechnology Conference (MNC 2014),
pp. 6C-5-5,
Nov. 2014.
Official location
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,
International Conference on Solid State Devices and Materials,
p. 974-975,
Sept. 2014.
Official location
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Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator,
International Conference on Solid State Devices and Materials,
p. 100-101,
Sept. 2014.
Official location
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Yusuke Shiino,
Hiroyuki Ito,
Taku Fujiwara,
Noboru Ishihara,
Hisashi Yamanouchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter,
The 2014 IEEE International Symposium on Circuits and Systems (ISCAS),
June 2014.
Official location
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R. Hayashi,
Y. Nishimura,
H. Nakazawa,
M. Ishida,
K. Sawada,
H. Ishii,
K. Machida,
N. Ishihara,
K. Masu,
C. Wang,
K. Iida,
M. Saito,
S. Yoshida.
PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads,
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT),
June 2014.
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,
7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014),
pp. P2-55,
June 2014.
Official location
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer,
2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014),
pp. 113-116,
May 2014.
Official location
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Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
Integrated CMOS-MEMS Technology and its Application,
The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society,
May 2014.
Official location
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Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer,
Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014),
pp. 69-72,
Apr. 2014.
Official location
Domestic Conference (Reviewed)
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Shota Kamei,
Kazuya Masu,
Katsuyuki Machida.
高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
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Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討,
応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム,
p. 22pm1-C1,
Oct. 2014.
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
集積化CMOS?MEMS技術によるSub-1G加速度センサの基礎検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
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Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
回路シミュレータを用いたMEMSエネルギーハーベスティングデバイスの検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
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Takaaki Matsushima,
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Au積層形成技術による3軸MEMS加速度センサの検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
International Conference (Not reviewed / Unknown)
Domestic Conference (Not reviewed / Unknown)
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Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル構造による3軸加速度センサの検討,
第75回応用物理学会秋季学術講演会,
pp. 13-066,
Sept. 2014.
Official location
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Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
エネルギーハーべスティングデバイスの検討(4),
第75回応用物理学会秋季学術講演会,
pp. 13-067,
Sept. 2014.
Official location
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Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-,
第75回応用物理学会秋季学術講演会,
pp. 13-101,
Sept. 2014.
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Shota Kamei,
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討,
第75回応用物理学会秋季学術講演会,
pp. 13-065,
Sept. 2014.
Official location
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Daisuke Yamane,
Shota Kamei,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P4,
July 2014.
Official location
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Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Shota Kamei,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタルによる静電容量型3軸加速度センサの基礎検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P5,
July 2014.
Official location
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Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P7,
July 2014.
Official location
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Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
p. 8,
July 2014.
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Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討,
平成26年電気学会センサ・マイクロマシン部門総合研究会,
pp. MSS-14-002,
May 2014.
Official location
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
MEMS加速度センサによるSub-1G検出の基礎検討,
平成26年電気学会全国大会,
Mar. 2014.
Official location
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Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
エネルギーハーベスティングデバイスの検討(2),
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
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Toshifumi Konishi,
Ken Kagaya,
Daisuke Yamane,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
エネルギーハーベスティングデバイスの検討(3),
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
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Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサ-2軸MEMS加速度センサの検討-,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
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Hiroyuki Ito,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
RF受信機のためのアレイ型MEMS共振器ミキサの検討,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
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Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1G MEMS加速度センサの検討,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
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