論文

• Devi Srujana Tenneti, Chihaya Mukaide, Kisuke Miyado, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage, Japanese Journal of Applied Physics, Vol. 64, p. 04SP20, Apr. 2025.  公式リンク  
  

国際会議発表 (査読有り)

• Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers, MNE2025 Southampton, MNE2025 Southampton, Sept. 2025.
• Shota Iima, Tomoyuki Kurioka, Shota Kanno, Chun Yi-Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Micro-Mechanical Properties of Annealed Electrodeposited Gold for Design of MEMS Structural Components, MNE2025 Southampton, MNE2025 Southampton, Sept. 2025.
• Wending Hou, Tomoyuki Kurioka, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Nickel Electroplating with Supercritical Carbon Dioxide Emulsified Nickel Sulfamate Bath, 247th ECS Meeting, May 2025.
• Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer, Material World 2025, 3rd Global Conference on Materials Science & Engineering, Material World 2025, 3rd Global Conference on Materials Science & Engineering, Apr. 2025.

国内会議発表 (査読有り)

• 曽根正人, Tso-Fu Mark Chang, 栗岡智行, 名越貴志, 町田克之, 伊藤浩之, 三宅美博. 高感度MEMS加速度センサ実現のための金めっき材料設計, 第16回集積化MEMS技術研究会, 第16回集積化MEMS技術研究会, June 2025.
• WENDING HOU, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications, 第72回応用物理学会春季学術講演会, 応用物理学会春季学術講演会, Mar. 2025.
• 飯間 翔太, 栗岡 智行, 菅野 翔太, Chun Yi-Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. 微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価, 第72回応用物理学会春季学術講演会, 応用物理学会春季学術講演会, Mar. 2025.

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