論文

• Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Miyake, Masato Sone. Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers, Journal of The Electrochemical Society, Oct. 2025.  公式リンク  
  
• Wending Hou, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Tso-Fu Mark Chang, Masato Sone. Void-Free Smooth Nickel Electrodeposition with Supercritical Carbon Dioxide Emulsified Sulfamate Bath in High Current Density, Journal of The Electrochemical Society, Vol. 172, p. 092515, Sept. 2025.  公式リンク  
  
• Jingyu Quan, Hirotaka Uchitomi, Ryo Shigeyama, Chenguang Gao, Taiki Ogata, Akira Inaba, Satoshi Orimo, Hiroyuki Ito, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake. High-sensitivity acceleration sensor detecting micro-mechanomyogram and deep learning approach for parkinson’s disease classification, Scientific Reports, Vol. 15, p. 30791, Aug. 2025.  公式リンク  
  
• Devi Srujana Tenneti, Chihaya Mukaide, Kisuke Miyado, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage, Japanese Journal of Applied Physics, Vol. 64, p. 04SP20, Apr. 2025.  公式リンク  
  

国際会議発表 (査読有り)

• Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Control of the Mechanical Properties of Multi-layered Ti/Au Micro-sized Components by Electroplating Towards an Ultra-High-Sensitive Inertial Accelerometer, 2025 MRS-Taiwan Annual Meeting, Nov. 2025.
• Zhitao Hu, Tomoyuki Kurioka, Yung-Jung Hsu, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Electrodeposition of Ruthenium on Copper and Titanium Substrates: A Comparative Study of Current Efficiency, 2025 MRS-Taiwan Annual Meeting, Nov. 2025.
• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone, Katsuyuki Machida. Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information, International Microprocesses and Nanotechnology Conference (MNC 2025), Nov. 2025.
• Shota Iima, Tomoyuki Kurioka, Shota Kanno, Chun Yi-Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Micro-Mechanical Properties of Annealed Electrodeposited Gold for Design of MEMS Structural Components, MNE2025 Southampton, MNE2025 Southampton, Sept. 2025.
• Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers, MNE2025 Southampton, MNE2025 Southampton, Sept. 2025.
• Wending Hou, Tomoyuki Kurioka, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Nickel Electroplating with Supercritical Carbon Dioxide Emulsified Nickel Sulfamate Bath, 247th ECS Meeting, May 2025.
• Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer, Material World 2025, 3rd Global Conference on Materials Science & Engineering, Material World 2025, 3rd Global Conference on Materials Science & Engineering, Apr. 2025.

国内会議発表 (査読有り)

• 飯間 翔太, 栗岡 智行, 菅野 翔太, Chun Yi-Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. 電解金めっき錘搭載静電容量型MEMS加速度センサの設計に向けた電解金めっき膜の微小機械特性と熱処理影響の評価, 第17回集積化MEMSシンポジウム, Nov. 2025.
• 高畑 寿志, 栗岡 智行, 山田 虎人, 町田 克之, Tso-Fu Mark Chang, 三宅 美博, 伊藤 浩之, 曽根 正人. Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討, 第17回集積化MEMSシンポジウム, Nov. 2025.
• 奥村 雅子, 栗岡 智行, 森 達彦, 山田 虎人, 向出 隼人, Chun Yi-Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. 静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討, 第17回集積化MEMSシンポジウム, Oct. 2025.
• 森 達彦, 栗岡 智行, 渡邉 春海, Chun-Yi Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. 静電容量型MEMS加速度センサに向けたTi/Au積層マイクロカンチレバーの実効ヤング率に対するアニーリングの影響評価, 第17回集積化MEMSシンポジウム, Oct. 2025.
• 曽根正人, Tso-Fu Mark Chang, 栗岡智行, 名越貴志, 町田克之, 伊藤浩之, 三宅美博. 高感度MEMS加速度センサ実現のための金めっき材料設計, 第16回集積化MEMS技術研究会, 第16回集積化MEMS技術研究会, June 2025.
• 飯間 翔太, 栗岡 智行, 菅野 翔太, Chun Yi-Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. 微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価, 第72回応用物理学会春季学術講演会, 応用物理学会春季学術講演会, Mar. 2025.
• WENDING HOU, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications, 第72回応用物理学会春季学術講演会, 応用物理学会春季学術講演会, Mar. 2025.

特許など

• 三宅美博, 緒方大樹. 歩行改善装置および歩行改善方法. 特許. 公開. 国立大学法人東京科学大学. 2023/12/01. 特願2023-203840. 2025/06/12. 特開2025-088963. 2025.

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