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三宅美博 研究業績一覧 (8件 / 535件)
論文
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Devi Srujana Tenneti,
Chihaya Mukaide,
Kisuke Miyado,
Torauto Yamada,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage,
Japanese Journal of Applied Physics,
Vol. 64,
p. 04SP20,
Apr. 2025.
公式リンク
国際会議発表 (査読有り)
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Shunkai Watanabe,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
MNE2025 Southampton,
MNE2025 Southampton,
Sept. 2025.
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Shota Iima,
Tomoyuki Kurioka,
Shota Kanno,
Chun Yi-Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Micro-Mechanical Properties of Annealed Electrodeposited Gold for Design of MEMS Structural Components,
MNE2025 Southampton,
MNE2025 Southampton,
Sept. 2025.
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Wending Hou,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Nickel Electroplating with Supercritical Carbon Dioxide Emulsified Nickel Sulfamate Bath,
247th ECS Meeting,
May 2025.
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Masato Sone,
Tso-Fu Mark Chang,
Tomoyuki Kurioka,
Chun-yi Chen,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake.
Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer,
Material World 2025, 3rd Global Conference on Materials Science & Engineering,
Material World 2025, 3rd Global Conference on Materials Science & Engineering,
Apr. 2025.
国内会議発表 (査読有り)
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曽根正人,
Tso-Fu Mark Chang,
栗岡智行,
名越貴志,
町田克之,
伊藤浩之,
三宅美博.
高感度MEMS加速度センサ実現のための金めっき材料設計,
第16回集積化MEMS技術研究会,
第16回集積化MEMS技術研究会,
June 2025.
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WENDING HOU,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications,
第72回応用物理学会春季学術講演会,
応用物理学会春季学術講演会,
Mar. 2025.
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飯間 翔太,
栗岡 智行,
菅野 翔太,
Chun Yi-Chen,
Tso-Fu Mark Chang,
町田 克之,
伊藤 浩之,
三宅 美博,
曽根 正人.
微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価,
第72回応用物理学会春季学術講演会,
応用物理学会春季学術講演会,
Mar. 2025.
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