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Publication List - Katsuyuki Machida (428 entries)
Journal Paper
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Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section,
Micro and Nano Engineering,
Vol. 23,
p. 100259,
May 2024.
Official location
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Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone,
Tso-Fu Mark Chang.
Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component,
Micro and Nano Engineering,
Vol. 23,
p. 100254,
Apr. 2024.
Official location
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Syunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ,
Micro and Nano Engineering,
Vol. 29,
p. 100249,
Mar. 2024.
Official location
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Ryosuke Miyai,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers,
Micro and Nano Engineering,
Vol. 23,
p. 100244,
Mar. 2024.
Official location
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Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki ; Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications,
Journal of The Electrochemical Society,
Vol. 171,
p. 032501,
Feb. 2024.
Official location
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Kisuke Miyado,
Devi Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology,
Japanese Journal of Applied Physics,
Vol. 63,
No. 4,
p. 04SP23,
Feb. 2024.
Official location
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Takumi Akiyama,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers ,
Micro and Nano Engineering,
Vol. 21,
p. 100226,
Sept. 2023.
Official location
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Kosuke Suzuki,
Yiming Jiang,
Ryohei Hori,
Ken Hashigata,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold,
Materials Today Communications,
Vol. 35,
p. 106072,
Apr. 2023.
Official location
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Akira Onishi,
Kisuke Miyado,
Devi Srujana Tenneti,
Katsuyuki Machida,
Parthojit Chakraborty,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology,
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Mar. 2023.
Official location
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Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Katsuyuki Machida,
Parthojit Chakraborty,
Shin-ichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure,
IEEE Sensors Journal,
Vol. 22,
Issue 15,
June 2022.
Official location
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Akira Onishi,
Kohei Shibata,
Akihiro Uchiyama,
Katsuyuki Machida,
Taiki Ogata,
Noboru Ishihara,
Hirotaka Uchitomi,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement,
Japanese Journal of Applied Physics,
Vol. 61,
p. SD1028,
Mar. 2022.
Official location
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression,
Surface & Coatings Technology,
Elsevier,
Vol. 436,
p. 128315,
Feb. 2022.
Official location
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Hiroyuki Ito,
Katsuyuki Machida,
Noboru Ishihara,
Yoshihiro Miyake,
Kazuya Masu.
A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds,
ECS Transactions,
Vol. 104,
No. 4,
pp. 83-91,
Oct. 2021.
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Hitomi Watanabe,
Tso-Fu Mark Chang,
Michael Schneider,
Ulrich Schmid,
Chun-Yi Chen,
Shinichi Iida,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency,
Electrochem,
MDPI,
Vol. 2,
pp. 216-223,
Apr. 2021.
Official location
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Yu-An Chien,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties,
Electrochem,
MDPI,
Vol. 1,
No. 4,
pp. 388-393,
Nov. 2020.
Official location
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Kazuya Masu,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Tso-Fu Mark Chang,
Masato Sone,
Ryo Shigeyama,
Taiki Ogata,
Yoshihiro Miyake.
CMOS-MEMS Based Microgravity Sensor and Its Application,
ECS Transactions,
Vol. 97,
No. 5,
pp. 91-108,
Apr. 2020.
Official location
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Kyotaro Nitta,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Shinichi Iida,
Daisuke Yamane,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers,
Journal of The Electrochemical Society,
IOP Science,
Vol. 167,
pp. 082503,
Apr. 2020.
Official location
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Kyotaro Nitta,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Shinichi Iida,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability,
IEEE Sensors 2019,
IEEE Conference Paper,
2019 IEEE SENSORS,
Jan. 2020.
Official location
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Tatsuya Koga,
Takashi Ichikawa,
Naoto Tanaka,
Taiki Ogata,
Hiroki Ora,
Daisuke Yamane,
Noboru Ishihara,
Hiroyuki Ito,
Masato Sone,
Katsuyuki Machida,
Yoshihiro Miyake,
Kazuya Masu.
High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds,
IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019),
IEEE Conference Paper,
IEEE,
Oct. 2019.
Official location
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Hao-Chun Tang,
Tso-Fu Mark Chang,
Yaw-Wang Chai,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect,
Metals,
MDPI,
Vol. 9,
No. 9,
pp. 987,
Sept. 2019.
Official location
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Katsuyuki Machida,
Daisuke Yamane,
Toshifumi Konishi,
Shin-ichi Iida,
Noboru Ishihara,
Tso-Fu Mark Chang,
Masato Sone,
Hiroyuki Ito,
Kazuya Masu.
MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology,
ECS Transactions,
Vol. 92,
pp. 169-184,
July 2019.
Official location
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Ken Hashigata,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices,
Microelectronic Engineering,
Vol. 213,
pp. 13-17,
May 2019.
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Ken Atsumi,
Shota Otobe,
Tatsuya Koga,
Takashi Ichikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers,
Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019),
IEEE Conference Paper,
IEEE,
May 2019.
Official location
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Kyotaro Nitta,
Tso-Fu Mark Chang,
Koichiro Tachibana,
Hao-chun Tang,
Chun-Yi Chen,
Shinichi Iida,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test,
Microelectronic Engineering,
Vol. 215,
pp. 111001,
May 2019.
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Koichiro Tachibana,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test,
Microelectronic Engineering,
Volume 207,
pp. 33-36,
Jan. 2019.
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Motohiro Takayasu,
Ippei Tsuji,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer,
Sensors and Materials,
Vol. 30,
No. 12,
pp. 2919-2926,
Dec. 2018.
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Keisuke Asano,
Hao-Chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications,
Microelectronic Engineering,
Elsevier,
Vol. 196,
pp. 20-24,
June 2018.
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shin-ichi Iida,
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology,
13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018),
pp. WM-II-f3243,
Apr. 2018.
Official location
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Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Katsuyuki Machida,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices,
Microelectronic Engineering,
Vol. 187-188,
pp. 105-109,
Apr. 2018.
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Hao-Chun Tang,
Ken Hashigata,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Takashi Nagoshi,
Toshifumi Konishi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide,
Surface and Coatings Technology,
Elsevier,
Vol. 350,
pp. 1065-1070,
Mar. 2018.
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Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers,
IEICE Electronics Express,
Vol. 15,
no. 2,
p. 20171227,
Jan. 2018.
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Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices,
Journal of The Electrochemical Society,
Vol. 165,
No. 2,
pp. D58-D63,
Jan. 2018.
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY,
Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
IEEE Conference Publications,
pp. 2187 - 2190,
Aug. 2017.
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Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices,
Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,
IEEE Conference Publications,
pp. 264 - 267,
Aug. 2017.
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Keisuke Asano,
Hao-Chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices,
Microelectronic Engineering,
Vol. 180,
pp. 15-19,
June 2017.
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Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures,
Materials Letters,
Vol. 202,
pp. 82-85,
May 2017.
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Hao-Chun Tang,
Chun-Yi Chen,
Masaharu Yoshiba,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices,
Journal of The Electrochemical Society,
Vol. 164,
No. 4,
pp. D244-D247,
Apr. 2017.
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Sari Yanagida,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Tensile Tests of Micro-Specimens Made of Electroplated Gold,
Microelectronics Engineering,
Vol. 174,
pp. 6-10,
Apr. 2017.
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer,
Microelectronics Reliability,
Vol. 66,
pp. 78-84,
Nov. 2016.
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology,
IEEE Sensors 2016,
IEEE Proceeding,
pp. 1162-1164,
Oct. 2016.
Official location
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Kazuya Masu,
Daisuke Yamane,
Katsuyuki Machida,
Masato Sone,
Yoshihiro Miyake.
Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease,
the 46th European Solid-State Device Research Conference (ESSDERC),
the 46th European Solid-State Device Research Conference (ESSDERC),
pp. 99-104,
Sept. 2016.
Official location
-
Hao-chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide,
Electrochemistry Communications,
Vol. 72,
pp. 126-130,
Sept. 2016.
Official location
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Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression,
Materials Transactions,
Vol. 57,
No. 8,
pp. 1257-1260,
July 2016.
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Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A 1-mG MEMS Sensor,
ECS Transactions,
vol. 72,
no. 3,
pp. 7-14,
May 2016.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength,
Electrochemistry Communications,
Vol. 67,
Page 51-54,
Apr. 2016.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers,
Microelectronics Engineering,
Vol. 153,
pp. 90-93,
Apr. 2016.
-
Y. Nishimura,
M. Ishida,
K. Sawada,
H. Ishii,
K. Machida,
K. Masu,
C. Wang,
K. Iida,
M. Saito,
S. Yoshida.
Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip,
ECS Trans.,
Vol. 69,
No. 10,
pp. 259-267,
Oct. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A 0.1G-to-20G Integrated MEMS Inertial Sensor,
Japanese Journal of Applied Physics,
The Japan Society of Applied Physics,
Volume 54,
Number 8,
pp. 087202.1-087202.4,
July 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G MEMS Sensor,
ECS Transactions,
The Electrochemical Society,
volume 66,
No. 5,
pp. 131-138,
May 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Shota Kamei,
Kazuya Masu,
Katsuyuki Machida.
An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors,
電気学会論文誌E(センサ・マイクロマシン部門誌),
一般社団法人 電気学会,
vol. 135,
no. 4,
pp. 142-143,
Apr. 2015.
-
Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass,
Microsystem Technologies,
Springer Berlin Heidelberg,
Vol. 22,
pp. 459-464,
Apr. 2015.
-
Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
Integrated CMOS-MEMS Technology and Its Applications,
ECS Transactions,
The Electrochemical Society,
volume 61,
no. 6,
pp. 21-39,
May 2014.
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology,
Japanese Journal of Applied Physics,
vol. 53,
pp. 04EE15.1-7,
Mar. 2014.
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Kazuya Masu.
Design of sub-1g microelectromechanical systems accelerometers,
Applied Physics Letters,
Vol. 104,
No. 7,
pp. 74102,
Feb. 2014.
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology,
Japanese Journal of Applied Physics,
Vol. 53,
pp. 27202,
Jan. 2014.
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Gou Motohashi,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer,
Japanese Journal of Applied Physics,
Vol. 52,
No. 6,
pp. 06GL04,
June 2013.
-
Toshifumi Konishi,
Katsuyuki Machida,
Satoshi Maruyama,
Makoto Mita,
Kazuya Masu,
Hiroshi Toshiyoshi.
A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language,
IEEE/ASME Journal of Microelectromechanical Systems,
vol. 22,
no. 3,
pp. 755-767,
2013.
-
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi.
Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators,
ECS Transactions,
The Electrochemical Society,
volume 50,
no. 14,
pp. 55-61,
Oct. 2012.
Book
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Tso-Fu Mark Chang,
Hideaki Nakajima,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi,
Masato Sone.
Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers,
Advances in Microelectronics: Reviews,
IFSA PUBLISHING, S.L.,
Vol. 3,
Apr. 2021.
-
Hao-Chun Tang,
Tso-Fu Mark Chang,
Yaw-Wang Chai,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect,
Dislocation Mechanics of Metal Plasticity and Fracturing (RonaldW. Armstrong, Ed),
MDPI,
pp. 87-96,
Nov. 2020.
Official location
-
Chun-Yi Chen,
Masaharu Yoshiba,
Haochun Tang,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida.
Pulse-Current Electrodeposition of Gold,
Novel Metal Electrodeposition and the Recent Application,
IntechOpen,
Mar. 2019.
-
Haochun Tang,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida.
Electrodeposition of Gold Alloys and the Mechanical Properties,
Novel Metal Electrodeposition and the Recent Application,
IntechOpen,
Mar. 2019.
-
Tso-Fu Mark Chang,
Chun-Yi Chen,
Yota Ishizuka,
Minami Teranishi,
Takuma Suzuki,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors,
Advances in Microelectronics Reviews,
IFSA Publishing,
Vol. 2,
pp. 23-48,
Feb. 2019.
Official location
-
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hao-Chun Tang,
Masaharu Yoshiba,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors,
Advances in Microelectronics Reviews,
IFSA Publishing,
Vol. 1,
pp. 93-106,
Dec. 2017.
-
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Masayoshi Esashi,
Hiroyuki Fujita,
Makoto Ishida,
Shuji Tanaka,
Kazuhiro Takahashi,
Nobuyoshi Koshida,
Hideki Koyama,
Minoru Sasaki,
SEIICHI HATA,
Gen Hashiguchi,
Hidekuni Takao,
Masao Nagase,
Hiroshi Yamaguchi,
Masashi Kitazawa,
Kazusuke Maenaka,
Kazuaki Sawada,
Ichiro Shibasaki,
Satoshi Nomura,
Yukihiro Takeuchi,
Hideki Shibata,
Narahashi Shoichi,
Yuji Suzuki,
Yasuhiro Nishioka,
Hiroki Morimura,
Eiji Higurashi,
Mitsuru Chino,
Naoki Uchiyama,
Hideki Adachi,
Harunobu Inoue,
Hideki Hashimoto.
Integration Technology for Heterogeneous Advanced Devices: Basics and Applications,
Integration Technology for Heterogeneous Advanced Devices: Basics and Applications,
株式会社 シーエムシー出版,
Nov. 2012.
International Conference (Reviewed)
-
Ryohei Hori,
Kazuya Fujita,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength,
Taiwan Association for Coating and Thin Film Technology (TACT2023),
Taiwan Association for Coating and Thin Film Technology (TACT2023),
Nov. 2023.
-
Masato Sone,
Tso-Fu Mark Chang,
Tomoyuki Kurioka,
Chun-yi Chen,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake.
Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers,
244th ECS Meeting,
244th ECS Meeting,
Oct. 2023.
-
Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone,
Tso-Fu Mark Chang.
Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components,
49th international conference on Micro and Nano Engineering (MNE2023),
49th international conference on Micro and Nano Engineering (MNE2023),
Sept. 2023.
-
Ryosuke Miyai,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer,
49th international conference on Micro and Nano Engineering (MNE2023),
49th international conference on Micro and Nano Engineering (MNE2023),
Sept. 2023.
-
御宿 希祐Kisuke Miyado,
Devi.Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Parthojit CHAKRABORTY,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer,
2023 International Conference on Solid State Devices and Materials,
Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02,
Sept. 2023.
Official location
-
Syunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
MNE2023,
49th international conference on Micro and Nano Engineering (MNE2023),
Sept. 2023.
-
Taro Omura,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
-
Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
-
Masato Sone,
Hitomi Watanabe,
Kyotaro Nitta,
Hideaki Nakajima,
Tomoyuki Kurioka,
Chun-Yi Chen,
Parthojit Chakraborty,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki. Machida,
Yoshihiro Miyake,
Tso-Fu Mark Chang.
A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer,
NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS,
Sept. 2022.
-
Tomoyuki Kurioka,
Koichiro Tachibana,
Kyotaro Nitta,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki. Machida,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests,
NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS,
Sept. 2022.
-
Takumi Akiyama,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
-
Yu-An Chien,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics,
The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021),
Dec. 2021.
-
Takumi Akiyama,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
-
Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
-
Kazuya Fujita,
Kosuke Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics,
TACT2021 International Thin Films Conference,
TACT2021 International Thin Films Conference,
Nov. 2021.
-
Kazuya Fujita,
Kosuke Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
-
Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
-
Takumi Akiyama,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components,
Micro and Nano Engineering Conference 2021 (MNE2021),
Sept. 2021.
-
Akihiro Uchiyama,
Takasi Ichikawa,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
A MEMS accelerometer with a single axis two proof masses for a wide detection range,
Transducers,
June 2021.
-
Takasi Ichikawa,
Akihiro Uchiyama,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer,
Inertial,
Mar. 2021.
-
Takashi Ichikawa,
Kohei Shibata,
Tatsuya Koga,
Katsuyuki Machida,
Shinichi Iida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Ito.
A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer,
International Conference on Solid State Devices and Materials,
Sept. 2020.
-
Takashi Ichikawa,
Ken Atsumi,
Tatsuya Koga,
Daisuke Yamane,
Shin-ichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes,
Design, Test, Integration & Packaging of MEMS/MOEMS,
June 2020.
-
Tatsuya Koga,
Takashi Ichikawa,
Daisuke Yamane,
Shinichi Iida,
Noboru Ishihara,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu.
A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing,
The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020),
Mar. 2020.
-
Yu-An Chien,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film,
MRS Fall Meeting 2019,
Dec. 2019.
-
Kyotaro Nitta,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Shinichi Iida,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method,
MRS Fall Meeting 2019,
Dec. 2019.
-
Tomoki Iriya,
Kyotaro Nitta,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electroplating of Au-Pd Alloy Films and the Mechanical Properties,
International Thin Films Conference (TACT 2019),
Nov. 2019.
-
Kosuke Suzuki,
Ken Hashigata,
Keisuke Asano,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test,
The 2nd International Conference on Material Strength and Applied Mechanics,
May 2019.
-
Masato Sone,
Hao-Chun Tang,
Masaharu Yoshiba,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu.
Mechanical properties of electrodeposited gold-copper alloy by micro-compression test,
The 2nd International Conference on Material Strength and Applied Mechanics,
The 2nd International Conference on Material Strength and Applied Mechanics,
May 2019.
-
Hitomi Watanabe,
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence,
The 2nd International Conference on Material Strength and Applied Mechanics,
May 2019.
-
Daisuke Yamane,
Shota Otobe,
Ken Atsumi,
Tatsuya Koga,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS,
32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019),
pp. 684-687,
Jan. 2019.
Official location
-
Shota Otobe,
Tatsuya Koga,
Ken Atsumi,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shin-ichi Iida,
Hiroyuki. Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes,
31st International Microprocesses and Nanotechnology Conference (MNC2018),
Nov. 2018.
-
Ken Hashigata,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone..
Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever,
IUMRS-ICA 2018,
IUMRS-ICA 2018,
Oct. 2018.
-
Keisuke Asano,
Hao-Chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone..
Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever,
IUMRS-ICA 2018,
IUMRS-ICA 2018,
Oct. 2018.
-
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshib,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Kyotaro Nitta,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Kyotaro Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Keisuke Asano,
Hao-chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Tso-Fu Mark Chang,
Hao-chun Tang,
Kyotaro Nitta,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electrodeposition of High Strength Au-Cu Alloys for MEMS Device,
2018 International Conference on Solid State Devices and Materials (SSDM2018),
2018 International Conference on Solid State Devices and Materials (SSDM2018),
Sept. 2018.
-
Masato Sone,
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu.
EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER,
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
Sept. 2018.
-
Ken Hashigata,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Hitomi Watanabe,
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Takahiro Yamamoto,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Ken Hashigata,
Haochun Tang,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
The effect of acid pre-treatment on electroplating of gold on titanium substrate,
32nd International Conference on Surface Modification Technologies (SMT32),
June 2018.
-
Shota Otobe,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection,
Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018),
June 2018.
-
Masato Sone,
Hao-Chun Tang,
Chun-yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu.
Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Kyoutarou Nitta,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
Chun-Yi Chen,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
HIdeaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
HIroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
Kyotaro Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
Kyoutarou Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices,
233rd ECS Meeting,
233rd ECS Meeting,
May 2018.
-
Ken Hashigata,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film,
22nd Topical Meeting of the International Society of Electrochemistry,
Apr. 2018.
-
Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys,
22nd Topical Meeting of the International Society of Electrochemistry,
22nd Topical Meeting of the International Society of Electrochemistry,
Apr. 2018.
-
Tso-Fu Mark Chang,
Haochun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Masato Sone,
Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Strategies of Mechanical Strengthening in Electroplated Au Materials,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Keisuke Asano,
Haochun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
Nov. 2017.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1mG Inertial Sensors by Multi-layer Metal Technology,
IUMRS International Conference in Asia (IUMRS-ICA) 2017,
F5-05,
Nov. 2017.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu,
Shinichi Iida.
Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating,
The 30th International Microprocesses and Nanotechnology Conference,
Nov. 2017.
-
Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,
2017 MRS Fall Meeting,
Nov. 2017.
-
Hirofumi Niijima,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes,
The 30th International Microprocesses and Nanotechnology Conference,
Nov. 2017.
-
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests,
2017 MRS Fall Meeting,
Nov. 2017.
-
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,
2017 MRS Fall Meeting,
Nov. 2017.
-
Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application,
TSCFA 2017 Annual Meeting,
Oct. 2017.
-
Ken Hashigata,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components,
TACT2017 International Thin Films Conference,
Oct. 2017.
-
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors,
2017 International Conference on Solid State Devices and Materials (SSDM 2017),
Sept. 2017.
-
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology,
2017 International Conference on Solid State Devices and Materials (SSDM 2017),
Sept. 2017.
Official location
-
Shouta Otobe,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes,
2017 International Conference on Solid State Devices and Materials (SSDM 2017),
Sept. 2017.
Official location
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test,
43rd International Conference on Micro & Nano Engineering (MNE2017),
MNE2017,
Sept. 2017.
-
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End,
43rd International Conference on Micro & Nano Engineering (MNE2017),
MNE2017,
Sept. 2017.
-
Ken Hashigata,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices,
43rd International Conference on Micro & Nano Engineering (MNE2017),
MNE2017,
Sept. 2017.
-
Chun-Yi Chen,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications,
RACI National Centenary Conference,
July 2017.
-
Chun-Yi Chen,
Hao-chun Tang,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components,
21th International Conference on Solid State Ionics, SSI-21,
SSI-21,
June 2017.
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology,
The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017),
pp. 2187-2190,
June 2017.
Official location
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices,
21th International Conference on Solid State Ionics,
June 2017.
-
Hao-chun Tang,
Chun-yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers,
21th International Conference on Solid State Ionics, SSI-21,
SSI-21,
June 2017.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Masato Sone,
Katsuyuki Machida,
Yoshihiro Miyake,
Kazuya Masu.
MEMS inertial sensors for biomedical applications,
12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017),
Apr. 2017.
Official location
-
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices,
IEEE-NEMS 2017,
IEEE-NEMS 2017,
Apr. 2017.
-
Chun-Yi Chen,
Hao-Chun Tang,
Masaharu Yoshiba,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer,
21st Topical Meeting of the International Society of Electrochemistry,
Apr. 2017.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating,
The 2016 PRiME Meeting,
Oct. 2016.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Haochun Tang,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers,
Separation Techniques 2016,2nd International Conference and Expo on Separation Techniques,
Separation Techniques 2016,
Sept. 2016.
-
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer,
The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology,
Sept. 2016.
-
Keisuke Asano,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices,
MNE2016, 42nd Micro& Nano Engineering,
MNE2016, 42nd Micro& Nano Engineering,
Sept. 2016.
-
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide,
MNE2016, 42nd Micro& Nano Engineering,
MNE2016, 42nd Micro& Nano Engineering,
Sept. 2016.
-
Sari Yanagida,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer,
MNE2016, 42nd Micro& Nano Engineering,
MNE2016, 42nd Micro& Nano Engineering,
Sept. 2016.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer,
MNE2016, 42nd Micro& Nano Engineering,
MNE2016, 42nd Micro& Nano Engineering,
Sept. 2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology,
2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016),
pp. 485-486,
Sept. 2016.
Official location
-
Masato Sone,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu.
Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture),
Integrative Biology-2016, International Conference on Integrative Biology Summit,
Integrative Biology-2016,
OMICS International,
July 2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology,
Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016),
pp. 299-300,
June 2016.
Official location
-
Yusuke Nishimura,
Onishi Shuhei,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Mitsumasa Saito,
Shinichi Yoshida.
COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP,
Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016),
pp. 87-88,
June 2016.
Official location
-
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Masakazu Sonobe,
Takumi Kobayashi,
Yamato Fukuta,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Kazuya Masu,
Katsuyuki Machida.
A study of railroad vehicle control by inertial sensors,
11th World Congress on Railway Research (11th WCRR),
May 2016.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Pulse Electroplating of Au Films with Ultra High Strength,
229th ECS Meeting,
May 2016.
-
Yota Ishizuka,
Sari Yanagida,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
-
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology,
IEEE Inertial Sensors 2016,
pp. 148-149,
Feb. 2016.
Official location
-
Y. Nishimura,
M. Ishida,
K. Sawada,
H. Ishii,
K. Machida,
K. Masu,
C. Wang,
K. Iida,
M. Saito,
S. Yoshida.
Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip,
9th Int’l Symp. on Nanomedicine (ISNM2015),
Dec. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Motohiro Takayasu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G CMOS-MEMS Accelerometer,
IEEE Sensors 2015,
pp. 513-516,
Nov. 2015.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Micro-Mechanical Properties of Electrodeposited Gold Thin Films,
TACT 2015 International Thin Films Conference,
TACT 2015 International Thin Films Conference,
Nov. 2015.
-
Y. Nishimura,
M. Ishida,
K. Sawada,
H. Ishii,
K. Machida,
K. Masu,
C. Wang,
K. Iida,
M. Saito,
S. Yoshida.
Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip,
The 228th Electrochemical Society Fall Meeting,
Oct. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
AMC2015, Advanced Metallization Conference,
AMC2015,
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Motohiro Takayasu,
Teruaki Safu,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology,
SSDM2015, 2015 International Conference on Solod State Devices and Materials,
SSDM2015, 2015 International Conference on Solod State Devices and Materials,
pp. 786-787,
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
25th Advanced Metallization Conference Asian Session (ADMETAplus2015),
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology,
41st Micro and Nano Engineering (MNE2015),
pp. Wed-C-p11,
Sept. 2015.
-
Toshifumi Konishi,
Daisuke Yamane,
Motohiro Takayasu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer,
2015 International Conference on Solid State Devices and Materials (SSDM 2015),
pp. 798-799,
Sept. 2015.
-
Chun-Yi Chen,
Masaharu Yoshiba,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating,
MNE2015, 41th International Conference on Micro and Nano Engineering,
MNE2015,
pp. Wed-C-p5,
Sept. 2015.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,
MNE2015, 41th International Conference on Micro and Nano Engineering,
MNE2015,
pp. Wed-C-p19,
Sept. 2015.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
pp. Wed-C-p81,
Sept. 2015.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
pp. 52-53,
Sept. 2015.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Mechanical Properties of Electrodeposited Gold for Application in MEMS,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
pp. 48-49,
Sept. 2015.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Compression deformation of micro-components fabricated by FIB from gold electrodeposited films,
International Symposium for Advanced Materials Research, ISAMR2015,
ISAMR2015,
pp. P13,
Aug. 2015.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Masaki Yano,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Tatsuo Sato,
Masato Sone.
Stability of Movable Structure Formed by Au Electroplating for MEMS Devices,
ICMAT2015 & IUMRS-ICA2015,,
ICMAT2015 & IUMRS-ICA2015,,
June 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G MEMS Sensor,
the 227th ECS Meeting,
pp. 1332,
May 2015.
-
Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology,
27th Int. Microprocesses and Nanotechnology Conference (MNC 2014),
pp. 6C-5-5,
Nov. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A 1mG-to-20G Integrated MEMS Inertial Sensor,
IEEE SENSORS 2014,
pp. 1591-1594,
Nov. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,
International Conference on Solid State Devices and Materials,
p. 974-975,
Sept. 2014.
Official location
-
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator,
International Conference on Solid State Devices and Materials,
p. 100-101,
Sept. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,
7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014),
pp. P2-55,
June 2014.
Official location
-
R. Hayashi,
Y. Nishimura,
H. Nakazawa,
M. Ishida,
K. Sawada,
H. Ishii,
K. Machida,
N. Ishihara,
K. Masu,
C. Wang,
K. Iida,
M. Saito,
S. Yoshida.
PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads,
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT),
June 2014.
-
Yusuke Shiino,
Hiroyuki Ito,
Taku Fujiwara,
Noboru Ishihara,
Hisashi Yamanouchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter,
The 2014 IEEE International Symposium on Circuits and Systems (ISCAS),
June 2014.
Official location
-
Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
Integrated CMOS-MEMS Technology and its Application,
The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society,
May 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer,
2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014),
pp. 113-116,
May 2014.
Official location
-
Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer,
Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014),
pp. 69-72,
Apr. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Gou Motohashi,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1G MEMS Accelerometer,
IEEE SENSORS 2013,
pp. 171-174,
Nov. 2013.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Satoshi Maruyama,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology,
2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013),
pp. G-4-2,
Sept. 2013.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Gou Motohashi,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION,
17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013),
pp. 22-25,
June 2013.
Official location
-
Hiroshi Toshiyoshi,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
A Multi-Physics Simulation Technique for Integrated MEMS,
2012 IEEE International Electron Devices Meeting (IEDM 2012),
Dec. 2012.
Official location
-
Youngshik Shin,
Katsube Kyohei,
Kazuaki Sawada,
Makoto Ishida,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior,
第29回センサ・マイクロマシンとその応用システム,
Oct. 2012.
-
Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Gou Motohashi,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers,
25th Int. Microprocesses and Nanotechnology Conference (MNC 2012),
Oct. 2012.
Official location
-
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi.
Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators,
The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME),
Oct. 2012.
Official location
-
Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Gou Motohashi,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer,
2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012),
Sept. 2012.
Official location
-
Toshifumi Konishi,
Satoshi Maruyama,
Makoto Mita,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Fujita,
Hiroshi Toshiyoshi.
A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language,
2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012),
Sept. 2012.
Official location
-
Kyohei Katsube,
Ryuhei Hayashi,
Youngshik Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Yuta Takekawa,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
Bio-MEMES Chip for Trapping Bacteria by Si-pillar Structure and Its Application to Legionella,
The Sixth Asia-Pacific Conferenceon Transducers and Micro/Nano Technologies (APCOT), IEEE,
July 2012.
Official location
-
Youngshik Shin,
Kyohei Katsube,
Kazuaki Sawada,
Makoto Ishida,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
Fabrication of Bio-MEMS Device for on-,
Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI Symp.B, 2012 MRS Spring Meeting, JSAP-MRS,
Apr. 2012.
Official location
-
Toshifumi Konishi,
Satoshi Maruyama,
Takaaki Matsushima,
Makoto Mita,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Fujita,
Hiroshi Toshiyoshi.
A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS,
2010 International Conference on Solid State Devices and Materials,
Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials,
2010 International Conference on Solid State Devices and Materials,
pp. 1158-1159,
Sept. 2010.
-
Taku Fujiwara,
Noboru Ishihara,
Shuhei Amakawa,
Hisashi Yamauchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
A Wearably Small Low-Power Wireless pH Sensor Module Incorporating an lon-sensitive Field-Effect Transtor,
The 13th International Meeting on Chemical Sensors (IMCS-13),
The 13th International Meeting on Chemical Sensors (IMCS-13),
The 13th International Meeting on Chemical Sensors (IMCS-13),
p. 378,
July 2010.
Domestic Conference (Reviewed)
-
Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun Yi Chen,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Tso-Fu Mark Chang,
Masato Sone.
Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-3,
Mar. 2024.
-
Tatsuhiko Mori,
Tomoyuki Kurioka,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-2,
Mar. 2024.
-
Ryosuke Miyai,
Tomoyuki Kurioka,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-1,
Mar. 2024.
-
Kisuke Miyado*,
Akira Onishi,
Tenneti Devi Srujana,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer,
第15回集積化MEMSシンポジウム,
第15回集積化MEMSシンポジウム論文集,
応用物理学会集積化MEMS技術研究会,
Vol. 8A2-D-4,
Oct. 2023.
-
Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Katsuyuki Machida,
Tomoyuki Kurioka,
Parthojit CHAKRABORTY,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology,
第84回応用物理学会秋季学術講演会,
第84回応用物理学会秋季学術講演会 講演予稿集,
Vol. 20p-B201-1,
Sept. 2023.
-
Kisuke Miyado,
Devi.Srujana Tenneti,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer,
第14回集積化MEMS技術研究ワークショップ,
p04,
Aug. 2023.
-
Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
単結晶金微小カンチレバーの曲げ強度に対する断面積の影響,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
p. 16a-B410-4,
Mar. 2023.
-
Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun Yi Chen,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone,
Tso-Fu Mark Chang.
金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
p. 16a-B410-2,
Mar. 2023.
-
Ryosuke Miyai,
Tomoyuki Kurioka,
Chun Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
p. 16a-B410-5,
Mar. 2023.
-
Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Katsuyuki Machida,
Parthojit CHAKRABORTY,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Design of serpentine spring for MEMS devices by gold multi-layer metal technology,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
16a-B410-6,
Mar. 2023.
-
Syunkai Watanabe,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
p. 16a-B410-4,
Mar. 2023.
-
Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Shinichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure,
第83回応用物理学会秋季学術講演会,
第83回応用物理学会秋季学術講演会,
22a-A406-2,
Sept. 2022.
-
Kisuke Miyado,
Akira Onishi,
Devi.Srujana Tenneti,
Parthojit CHAKRABORTY,
Katsuyuki Machida,
Shinichi Iida,
Toshifumi Konishi,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer,
第13回集積化MEMS技術研究ワークショップ,
Aug. 2022.
-
Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
Au単結晶の微⼩カンチレバーの機械的特性における断⾯形状依存性,
2022年応⽤物理学会春季講演会,
Mar. 2022.
-
Taro Omura,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
⾦めっき材料における機械的特性の電流密度依存性,
2022年応⽤物理学会春季講演会,
Mar. 2022.
-
Takumi Akiyama,
Yu-An Chien,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Katsuyuki Machida,
Yoshihiro Miyake,
Masato Sone.
MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価,
2022年応⽤物理学会春季講演会,
Mar. 2022.
-
藤田 一矢,
鈴木 康介,
Chun-Yi Chen,
Tso-Fu Mark Chang,
山根 大輔,
伊藤 浩之,
町田 克之,
益 一哉,
曽根 正人.
金単結晶微小カンチレバーの機械的特性とサンプル形状効果,
第82回応用物理学会秋季学術講演会,
第82回応用物理学会秋季学術講演会,
Sept. 2021.
-
Masato Sone,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu.
医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価,
日本金属学会 2021年春季講演大会,
日本金属学会 2021年春季講演大会,
Mar. 2021.
-
Takasi Itikawa,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Noboru Ishihara,
Hiroyuki Ito,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術で作製したMEMS加速度センサの衝撃特性評価,
第11回集積化MEMSシンポジウム,
19pm4-A-4,
Nov. 2019.
-
Sayaka Koga,
Takasi Itikawa,
Naoto Tanaka,
Taiki Ogata,
Hiroki Ora,
Daisuke Yamane,
Noboru Ishihara,
Hiroyuki Ito,
Masato Sone,
Katsuyuki Machida,
Yoshihiro Miyake,
Kazuya Masu.
微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討,
第11回集積化MEMSシンポジウム,
19pm4-A-3,
Nov. 2019.
-
Tso-Fu Mark Chang,
Yu-An Chien,
Hao-Chun Tang,
Chun-Yi Chen,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles,
第80回応用物理学会秋季学術講演会,
Sept. 2019.
-
Masato Sone,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu.
超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価,
2019年 関西表面技術シンポジウム,
電気鍍金研究会,
July 2019.
-
Hitomi Watanabe,
Takuma Suzuki,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Ti/Au微小カンチレバーの温度依存性への積層構造の影響,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Kyotaro Nitta,
Tang Haochun,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
電気めっき法によるAu-Cu合金微小カンチレバーの作製,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Kosuke Suzuki,
Ken Hashigata,
Keisuke Asano,
Chun Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
微小曲げ試験による金材料の機械的強度のサンプル形状効果,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Takasi Itikawa,
Hirofumi Niijima,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3軸Au錘MEMS加速度センサにおける平行平板型電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Ken Atsumi,
Shouta Otobe,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術によるピラー型容量検出電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
-
Sayaka Koga,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討,
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会),
Oct. 2018.
Official location
-
Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Solid Solution Strengthening of Gold Based Materials for MEMS Applications,
The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems,
Oct. 2018.
-
Shouta Otobe,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ,
第10回集積化MEMSシンポジウム,
Oct. 2018.
Official location
-
Takasi Itikawa,
Hirofumi Niijima,
Sayaka Koga,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Au単一錘平行平板型3軸MEMS加速度センサの検討,
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会),
Oct. 2018.
-
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone.
A Study on Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating for MEMS Accelerometers,
第79回応用物理学会秋季学術講演会,
第79回応用物理学会秋季学術講演会,
Sept. 2018.
-
Hao-Chun Tang,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
-
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Yoshihiro Miyake,
Kazuya Masu.
集積化CMOS-MEMS技術による?感度慣性センサと応?システム,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
-
Hideaki Nakajima,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone.
電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
-
Kyoutarou Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
-
Keisuke Asano,
Hao-Chun Tang,
Chun Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
電析制御による微⼩⾦カンチレバーの曲げ特性の改善,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
-
Tatsuya Koga,
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology,
The 9th Symposium on Integrated MEMS Technology,
Oct. 2017.
Official location
-
大西 脩平,
崔 容俊,
Makoto Ishida,
Kazuaki Sawada,
Hitoshi Ishii,
Katsuyuki Machida,
Kazuya Masu,
二階堂 靖彦,
Mitsumasa Saito,
Shinichi Yoshida.
フォトゲート型蛍光センサを用いたレジオネラの蛍光観測,
第9回集積化MEMSシンポジウム,
Oct. 2017.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタルMEMS慣性センサの長期振動特性評価,
第9回集積化MEMSシンポジウム,
Oct. 2017.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討,
第9回集積化MEMSシンポジウム,
Oct. 2017.
Official location
-
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討,
第9回集積化MEMSシンポジウム,
01pm1-A-6,
Oct. 2017.
Official location
-
Hirofumi Niijima,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2),
第34回「センサ・マイクロマシンと応用システム」シンポジウム,
01am2-PLN-8,
Oct. 2017.
Official location
-
Kosuke Orihara,
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討,
第34回「センサ・マイクロマシンと応用システム」シンポジウム,
31am3-PLN-2,
Oct. 2017.
Official location
-
Shouta Otobe,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer,
The 34th SENSOR SYMPOSIUM,
Oct. 2017.
Official location
-
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
A capacitive sensor circuit based on relaxation oscillator for MEMS inertial sensors,
The 9th Symposium on Integrated MEMS Technology,
Oct. 2017.
-
Masato Sone,
Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Kazuya Masu,
Katsuyuki Machida.
微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 (招待講演),
第6回CSJ化学フェスタ,
第6回CSJ化学フェスタ,
日本化学会,
Nov. 2016.
-
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法,
第8回集積化MEMSシンポジウム,
p. 25am2-PM-007,
Oct. 2016.
Official location
-
Yusuke Nishimura,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida,
Shinichi Yoshida.
マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測,
第8回集積化MEMSシンポジウム,
p. 25am2-PM-019,
Oct. 2016.
-
Teruaki Safu,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術によるMEMS加速度センサのばね定数設計方法,
第8回集積化MEMSシンポジウム,
p. 25pm4-PM-008,
Oct. 2016.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1mG検出へ向けた積層メタルMEMS慣性センサ,
第8回集積化MEMSシンポジウム,
p. 25am2-PM-001,
Oct. 2016.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
差動型積層メタルMEMS加速度センサの検討,
第8回集積化MEMSシンポジウム,
p. 25am2-PM-003,
Oct. 2016.
Official location
-
Toshiaki Gonda,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Study of Inertial Sensor Module with MEMS Accelerometers by Multi-layer Metal Technology,
集積化MEMSシンポジウム,
p. 25pm4-PM-006,
Oct. 2016.
Official location
-
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Noboru Ishihara,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
A high-resolution capacitive sensor circuit using RC oscillator,
第8回 集積化MEMSシンポジウム,
Oct. 2016.
-
Keisuke Asano,
Hao-Chun Tang,
Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone,
Takashi Nagoshi.
微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2016.
-
Sari Yanagida,
Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone,
Takashi Nagoshi.
微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2016.
-
Masaharu Yoshiba,
Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone,
Takashi Nagoshi.
高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2016.
-
Minami Teranishi,
Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Kazuya Masu,
Masato Sone,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2016.
-
曽根正人,
Tso-Fu Mark Chang,
陳君怡,
山根大輔,
益一哉,
町田克之.
高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 (招待講演),
日本学術振興会・第172委員会,
日本学術振興会・第172委員会,
Oct. 2016.
-
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications,
第77回応用物理学会秋季学術講演会,
pp. 15a-B10-13,
Sept. 2016.
Official location
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
電解金めっきで作製したTi/Au微小カンチレバーの構造安定性,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
-
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
-
Yota Ishizuka,
Sari Yanagida,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshihumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
マイクロ圧縮試験による金/チタン積層構造の機械的特性評価,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
-
Masaharu Yoshiba,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
-
Keisuke Asano,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
マイクロ曲げ試験による電析金薄膜の機械的特性評価,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
-
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
移動体制御における慣性センサ適用性の検討,
第7回 集積化MEMSシンポジウム,
Oct. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1G?20G集積化MEMS慣性センサ,
第7回集積化MEMSシンポジウム,
pp. 29pm3-PM-2,
Oct. 2015.
-
Teruaki Safu,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
MEMS加速度センサのための金属構造体の密着力評価,
第7回集積化MEMSシンポジウム,
pp. 29pm3-PM-5,
Oct. 2015.
-
Yusuke Nishimura,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
Stress responses of bacteria confined in microfluidic chips,
第7回集積化MEMSシンポジウム,
pp. 30pm1-D-3,
Oct. 2015.
-
Toshifumi Konishi,
Daisuke Yamane,
Motohiro Takayasu,
Hiroyuki Ito,
Noboru Ishihara,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Katsuyuki Machida.
マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討,
第7回集積化MEMSシンポジウム,
pp. 29pm2-D-4,
Oct. 2015.
-
Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討,
応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム,
p. 22pm1-C1,
Oct. 2014.
-
Takaaki Matsushima,
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Au積層形成技術による3軸MEMS加速度センサの検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
-
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
回路シミュレータを用いたMEMSエネルギーハーベスティングデバイスの検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Shota Kamei,
Kazuya Masu,
Katsuyuki Machida.
高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
集積化CMOS?MEMS技術によるSub-1G加速度センサの基礎検討,
第6回集積化MEMSシンポジウム,
Oct. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Ken Kagaya,
Masafumi Tsukuda,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサの特性評価,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMSシンポジウム,
pp. 6PM3-PIM-002,
Nov. 2013.
Official location
-
Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Masafumi Tsukuda,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
エネルギーハーベストデバイスの小型化の検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMSシンポジウム,
pp. 6PM3-PIM-003,
Nov. 2013.
Official location
-
Hiroyuki Ito,
Toshifumi Konishi,
Daisuke Yamane,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMSシンポジウム,
pp. 7AM2-E-8,
Nov. 2013.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Satoshi Maruyama,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMSシンポジウム,
pp. 6PM3-PIM-001,
Nov. 2013.
Official location
-
Youngshik Shin,
Katsube Kyohei,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
Fabrication of Microfluidic Device for On-chip Observation of Bacterial Behavior,
第29回センサ・マイクロマシンとその応用システム,電気学会,
Oct. 2012.
Official location
-
Ryuhei Hayashi,
Katsube Kyohei,
Youngshik Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
MEMS型細菌捕獲チップの製作とレジオネラを用いた評価,
第29回センサ・マイクロマシンとその応用システム,電気学会,
Oct. 2012.
Official location
-
Daisuke Yamane,
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS加速度センサのためのデバイスの検討,
応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム,
Oct. 2012.
Official location
-
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
RFミキサ回路のため高速MEMSスイッチの検討,
応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム,
Oct. 2012.
Official location
-
Toshifumi Konishi,
Tomofumi Maruyama,
Makoto Mita,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Fujita,
Hiroshi Toshiyoshi.
ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術,
応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム,
Oct. 2012.
Official location
-
Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
統合設計技術のためのMEMS加速度センサのモデルの検討,
応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム,
Oct. 2012.
Official location
-
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
0.35μmCMOS-LSIによるMEMSセンサ用VCO回路の検討,
応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム,
Oct. 2012.
Official location
-
Youngshik Shin,
Katsube Kyohei,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
Fabrication of microfluidic device for the bacteria observation,
第3回集積化MEMS技術研究ワークショップ,
July 2012.
-
Katsube Kyohei,
Ryuhei Hayashi,
Youngshik Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Changle Wang,
Yuta Takekawa,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
集積化MEMS技術による細菌迅速診断チップの開発,
第3回集積化MEMS技術研究ワークショップ,
July 2012.
-
Daisuke Yamane,
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
A Study on Arrayed CMOS-MEMS Accelerometers,
応用物理学会・集積化MEMS技術研究会主催 第3回集積化MEMS技術研究ワークショップ,
July 2012.
Official location
-
Toshifumi Konishi,
gou motohashi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS 加速度センサの検討 (2),
第59 回応用物理学関係連合講演会,
第59 回応用物理学関係連合講演会 講演予稿集,
応用物理学会,
pp. 22-020,
Mar. 2012.
-
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS 加速度センサの検討(1),
第59 回応用物理学関係連合講演会,
第59 回応用物理学関係連合講演会 講演予稿集,
応用物理学会,
pp. 22-019,
Mar. 2012.
-
Katsube Kyohei,
Ryuhei Hayashi,
Eishiki Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hitoshi Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐,
第59 回応用物理学関係連合講演会,
第59 回応用物理学関係連合講演会 講演予稿集,
応用物理学会,
pp. 22-043,
Mar. 2012.
-
Ryuhei Hayashi,
Katsube Kyohei,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hitoshi Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐,
第59 回応用物理学関係連合講演会,
第59 回応用物理学関係連合講演会 講演予稿集,
応用物理学会,
pp. 22-044,
Mar. 2012.
-
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Katsuyuki Machida.
0.35μmCMOS-LSIによるMEMSセンサ用VCO回路の検討,
2012.
-
Taku Fujiwara,
Noboru Ishihara,
Shuhei Amakawa,
Hisashi Yamauchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Wireless pH sensor module with an ISFET,
2010 年 電子情報通信学会総合大会,
2010 年 電子情報通信学会総合大会,
2010 年 電子情報通信学会総合大会,
pp. 42,
Mar. 2010.
International Conference (Not reviewed / Unknown)
-
Daisuke Yamane,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu.
Sub-1mG MEMS Inertial Sensor for Biomedical Applications,
The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education(ICNERE2018),
Nov. 2018.
-
Daisuke Yamane,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu.
High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology,
Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development,
Sept. 2018.
-
Kazuya Masu,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake.
CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease,
4th International Conference on Condensed Matter and Materials Physics,
Aug. 2018.
-
Onishi, S.,
Joon, C. Y.,
Ishida, M.,
Sawada, K.,
Ishii, H.,
Katsuyuki Machida,
Kazuya Masu,
Nikaido, Y.,
Saito, M.,
Yoshida, S..
Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing,
Symposium on Semiconductor Process Integration 10 held during the 232nd Meeting of the Electrochemical-Society (ECS),
SEMICONDUCTOR PROCESS INTEGRATION 10,
ELECTROCHEMICAL SOC INC,
Vol. 80,
No. 4,
pp. 157-164,
2017.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
A 1-mG MEMS Sensor,
229th ECS Meeting,
May 2016.
Official location
-
Daisuke Yamane,
Konishi, T.,
Safu, T.,
Toshiyoshi, H.,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology,
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016,
pp. 419-422,
2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Nano-G metrology system and its biomedical applications by CMOS-MEMS technology,
3rd Int'l Conf. on Integrative Biology,
Biological Systems: Open Access,
OMICS International Conferences,
Volume 4,
pp. 87,
Aug. 2015.
-
Daisuke Yamane,
Kazuya Masu,
Katsuyuki Machida.
A Sub-1G MEMS Inertial Sensor,
International Symposium for Advanced Materials Research (ISAMR 2015),
Aug. 2015.
-
Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-,
2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015),
pp. 201,
Apr. 2015.
Official location
-
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu.
MEMS for sensing sub-1G,
The First Joint Workshop on Electrical Engineering between Tokyo Tech &,
pp. 19,
Nov. 2014.
-
Ishii, H.,
Sawada, K.,
Ishida, M.,
Katsuyuki Machida,
Iida, K.,
Saito, M.,
Yoshida, S..
Bio-MEMS chip for bacteria detection-a challenge of si technology to biomedical field,
ECS Transactions,
Vol. 58,
No. 9,
pp. 125-133,
2013.
-
Maruyama, S.,
Konishi, T.,
Katsuyuki Machida,
Ishihara, N.,
Kazuya Masu,
Fujita, H.,
Toshiyoshi, H..
A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners,
International Conference on Optical MEMS and Nanophotonics,
pp. 21-22,
2013.
-
Kazuya Masu,
Ishihara, N.,
Konishi, T.,
Katsuyuki Machida,
Toshiyoshi, H..
Challenges in integration of diverse functionalities on CMOS,
Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC,
pp. 390-393,
2013.
-
Hiroshi Toshiyoshi,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL,
Mixed Design of Integrated Circuits and Systems (MIXDES 2013),
2013.
Official location
-
Kazuya Masu,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
How can we bridge the gap between photonics and Si CMOS LSI?,
The 2nd International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems-(ISPEC 2012),
pp. E-2,
Dec. 2012.
Domestic Conference (Not reviewed / Unknown)
-
Akihiro Uchiyama,
Kohei Shibata,
Akira Onishi,
Takasi Ichikawa,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
ワイドレンジAu錘1軸MEMS加速度センサの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
-
Akira Onishi,
Akihiro Uchiyama,
Kohei Shibata,
Takasi Ichikawa,
Sangyeop Lee,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
-
Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Sangyeop Lee,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Ito.
Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討,
第13回集積化MEMSシンポジウム,
Nov. 2021.
-
Akira Onishi,
Akihiro Uchiyama,
Kohei Shibata,
Takasi Itikawa,
Sangyeop Lee,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討,
第82回 応用物理学会秋季学術講演会,
Sept. 2021.
-
Takasi Itikawa,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討,
令和2年度E部門総合研究会,
July 2021.
-
Kohei Shibata,
Akihiro Uchiyama,
Akira Onishi,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討,
令和3年度E部門総合研究会,
July 2021.
-
Akihiro Uchiyama,
Takasi Ichikawa,
Kohei Shibata,
Shinichi Iida,
Sangyeop Lee,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討,
応用物理学会春季学術講演会,
Mar. 2021.
-
Takasi Itikawa,
Akihiro Uchiyama,
Sayaka Koga,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Shinichi Iida,
Hiroyuki Ito.
100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討,
第12回集積化MEMSシンポジウム,
Oct. 2020.
-
Akihiro Uchiyama,
Takasi Itikawa,
Sayaka Koga,
Katsuyuki Machida,
Kazuya Masu,
Noboru Ishihara,
Shinichi Iida,
Hiroyuki Ito.
Au錘一軸MEMS加速度センサの差動容量型電極構造の検討,
第12回集積化MEMSシンポジウム,
Oct. 2020.
-
Kohei Shibata,
Takasi Itikawa,
Sayaka Koga,
Katsuyuki Machida,
Kazuya Masu,
Noboru Ishihara,
Shinichi Iida,
Hiroyuki Ito.
高分解能単一Au 錘CMOS-MEMS 加速度センサの検討,
第12回集積化MEMSシンポジウム,
Oct. 2020.
-
Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討,
第81回 応用物理学会秋季学術講演会,
Sept. 2020.
-
Akihiro Uchiyama,
Takasi Itikawa,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ,
第81回 応用物理学会秋季学術講演会,
Sept. 2020.
-
本田優斗,
田中佐和子,
崔容俊,
Toshihiko Noda,
Kazuhiro Takahashi,
Kazuaki Sawada,
Hitoshi Ishii,
Katsuyuki Machida,
Hiroyuki Ito,
二階堂靖彦,
Mitsumasa Saito,
Shinichi Yoshida.
フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討,
令和2年度E部門総合研究会,
July 2020.
-
Ken Atsumi,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
-
Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
-
Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3Dピラー型Au錘MEMS加速度センサ,
第36回「センサ・マイクロマシンと応用システム」シンポジウム,
19am3-PS3-21,
Nov. 2019.
-
Hiroyuki Ito,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Noboru Ishihara,
Yoshihiro Miyake,
Katsuyuki Machida,
Kazuya Masu.
兆し計測のための高感度MEMS加速度センサ技術,
計測自動制御学会 システム・情報部門 学術講演会 2019,
Nov. 2019.
-
Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2),
第80回応用物理学会秋季学術講演会,
Sept. 2019.
-
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Yoshihiro Miyake,
Kazuya Masu.
MEMS加速度センサと生体計測への応用,
新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会,
May 2018.
-
Ken Hashigata,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Tatsuya Koga,
Motohiro Takayasu,
Daisuke Yamane,
Hiroyuki Ito,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2),
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS-MEMS技術の課題と展望,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Hirofumi Niijima,
Shouta Otobe,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
高感度MEMS加速度センサのBrownian Noise評価に関する検討,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Chun Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu,
Shinichi Iida.
積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Yoshihiro Miyake,
Kazuya Masu.
集積化CMOS-MEMS技術による高感度慣性センサと応用システム,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
Hirofumi Niijima,
Shouta Otobe,
Motohiro Takayasu,
Daisuke Yamane,
Hiroyuki Ito,
Teruaki Safu,
Toshifumi Konishi,
Shiro Dosho,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass,
平成30年電気学会全国大会,
Mar. 2018.
-
Motohiro Takayasu,
Tatsuya Koga,
Ippei Tsuji,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Study on resolution evaluation using tilt for 1-mG MEMS accelerometer,
The 2018 Annual Meeting of The Institute of Electrical Engineers of Japan,
Mar. 2018.
-
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology,
The 78th JSAP Autumn Meeting, 2017,
Sept. 2017.
Official location
-
Tatsuya Koga,
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology,
The 78th JSAP Autumn Meeting, 2017,
Sept. 2017.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating,
The 78th JSAP Autumn Meeting, 2017,
Sept. 2017.
Official location
-
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
A high-resolution capacitive sensor circuit for MEMS accelerometers,
The 78th JSAP Autumn Meeting, 2017,
Sept. 2017.
-
Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
An evaluation of capacitive sensor circuit for MEMS accelerometers,
第8回 集積化MEMS技術研究ワークショップ,
July 2017.
-
Ippei Tsuji,
Motohiro Takayasu,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology,
第8回 集積化MEMS技術研究ワークショップ,
July 2017.
Official location
-
Masato Sone,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価,
第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー,
第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー,
June 2017.
-
Motohiro Takayasu,
Toshiaki Gonda,
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
人体振動測定のためのMEMS慣性センサを用いたモジュールの検討,
LSIとシステムのワークショップ2017,
May 2017.
-
Motohiro Takayasu,
Toshiaki Gonda,
Daisuke Yamane,
Hiroyuki Ito,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A study of module using MEMS accelerometer by multi-layer metal technology,
The 64th JSAP Spring Meeting, 2017,
Mar. 2017.
-
Tso-Fu Mark Chang,
Toshifumi Konishi,
Teruaki Safu,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Tso-Fu Mark Chang,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術によるTi/Auめっき構造体のヤング率評価(1),
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-14,
Mar. 2017.
-
Takuma Suzuki,
Tso-Fu Mark Chang,
Chun Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討,
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-12,
Mar. 2017.
-
Takuma Suzuki,
Tso-Fu Mark Chang,
Chun Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討,
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-11,
Mar. 2017.
-
Katsuyuki Machida,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Tso-Fu Mark Chang,
Kazuya Masu,
Masato Sone.
積層メタル技術によるTi/Auめっき構造体のヤング率評価(2),
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-15,
Mar. 2017.
-
Toshiaki Gonda,
Motohiro Takayasu,
Daisuke Yamane,
Hiroyuki Ito,
Toshifumi Konishi,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Measurement-System using Vehicle-Control for Inertial Sensors,
第64回応用物理学会春季学術講演会,
p. 14p-P3-19,
Mar. 2017.
Official location
-
Teruaki Safu,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術による3軸MEMS加速度センサのばね定数設計方法,
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-17,
Mar. 2017.
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討,
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-16,
Mar. 2017.
-
Tomoki Iizuka,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討,
第64回応用物理学会春季学術講演会,
p. 14p-P3-13,
Mar. 2017.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル差動型MEMS加速度センサの基礎検討,
第77回応用物理学会秋季学術講演会,
pp. 14p-P5-3,
Sept. 2016.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
CMOS-MEMS慣性センサにおける機械的ノイズの解析手法,
第77回応用物理学会秋季学術講演会,
pp. 14p-P5-1,
Sept. 2016.
Official location
-
Teruaki Safu,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術によるMEMS加速度センサのばね定数設計方法(I),
第77回応用物理学会秋季学術講演会,
pp. 15p-B10-8,
Sept. 2016.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1mG検出へ向けた積層メタルMEMS慣性センサ,
第77回応用物理学会秋季学術講演会,
pp. 14p-P5-2,
Sept. 2016.
Official location
-
Motohiro Takayasu,
Toshiaki Gonda,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
小型高感度MEMS慣性センサモジュールの試作評価,
LSIとシステムのワークショップ2016,
May 2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討,
第63回応用物理学会春季学術講演会,
pp. 21p-P17-18,
Mar. 2016.
-
Toshifumi Konishi,
Daisuke Yamane,
Teruaki Safu,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討,
第63回応用物理学会春季学術講演会,
pp. 21p-P17-17,
Mar. 2016.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討,
電子情報通信学会2016年総合大会,
pp. C-10-16,
Mar. 2016.
-
Anky Liu,
小西敏文,
山根大輔,
伊藤浩之,
道正志郎,
石原昇,
町田克之,
益一哉.
CMOS低雑音オペアンプ設計法の検討,
電子情報通信学会2016年総合大会,
pp. C-12-13,
Mar. 2016.
Official location
-
Yusuke Nishimura,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
ビーズを用いたPDMS製細菌捕獲チップの検討? -紫外光照射によるレジオネラの光応答の観測-,
第76回応用物理学会秋季学術講演会,
pp. 14a-1C-10,
Sept. 2015.
-
Teruaki Safu,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Masato Sone,
Kazuya Masu,
Katsuyuki Machida.
MEMS加速度センサのための金属構造体の密着力評価,
第76回応用物理学会秋季学術講演会,
pp. 15a-PB4-3,
Sept. 2015.
-
Toshifumi Konishi,
Daisuke Yamane,
Motohiro Takayasu,
Hiroyuki Ito,
Noboru Ishihara,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Katsuyuki Machida.
ゲイン制御型CMOS-MEMS加速度センサ回路の検討,
第76回応用物理学会秋季学術講演会,
pp. 15a-PB4-2,
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
Sub-1G?20G集積化MEMS加速度センサの基本評価,
第76回応用物理学会秋季学術講演会,
pp. 15a-PB4-3,
Sept. 2015.
-
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Shota Kamei,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
慣性センサを用いた移動体制御の基礎検討,
平成27年 電気学会 センサ・マイクロマシン部門総合研究会,
July 2015.
-
Minami Teranishi,
Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
電解金めっきで作製した微小カンチレバーの形状安定性評価,
平成27年電気学会センサ・マイクロマシン部門総合研究会,
pp. 15-18,
July 2015.
Official location
-
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
MEMS慣性センサを用いた移動体制御の検討,
第6回 集積化MEMS技術研究ワークショップ,
July 2015.
-
Yusuke Nishimura,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
マイクロ流路内でのレジオネラ属菌のストレス応答,
平成27年電気学会センサ・マイクロマシン部門総合研究会,
July 2015.
Official location
-
Minami Teranishi,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Takaaki Matsushima,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
電解金めっきで作製したMEMSデバイスにおける動作構造安定性,
応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ,
p. 7,
July 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1G検出可能な3軸MEMS加速度センサの基礎検討,
平成27年電気学会全国大会,
Mar. 2015.
Official location
-
Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
ビーズを用いたPDMS製細菌捕獲チップの検討? -各種細菌の蛍光強度特性の時間依存性-,
第62回応用物理学会春季学術講演会,
pp. 12-128,
Mar. 2015.
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
エネルギーハーべスティングデバイスの検討(5),
第62回応用物理学会春季学術講演会,
p. 12-125,
Mar. 2015.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討,
第62回応用物理学会春季学術講演会,
p. 17-189,
Mar. 2015.
Official location
-
Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-,
第75回応用物理学会秋季学術講演会,
pp. 13-101,
Sept. 2014.
-
Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル構造による3軸加速度センサの検討,
第75回応用物理学会秋季学術講演会,
pp. 13-066,
Sept. 2014.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
エネルギーハーべスティングデバイスの検討(4),
第75回応用物理学会秋季学術講演会,
pp. 13-067,
Sept. 2014.
Official location
-
Shota Kamei,
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討,
第75回応用物理学会秋季学術講演会,
pp. 13-065,
Sept. 2014.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Kazuya Masu,
Hiroshi Toshiyoshi,
Katsuyuki Machida.
マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P7,
July 2014.
Official location
-
Yusuke Nishimura,
Ryuhei Hayashi,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Kazuya Masu,
Changle Wang,
Kenichiro Iida,
Mitsumasa Saito,
Shinichi Yoshida.
マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
p. 8,
July 2014.
-
Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Shota Kamei,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタルによる静電容量型3軸加速度センサの基礎検討,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P5,
July 2014.
Official location
-
Daisuke Yamane,
Shota Kamei,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ,
応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ,
pp. P4,
July 2014.
Official location
-
Daisuke Yamane,
Takaaki Matsushima,
Toshifumi Konishi,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討,
平成26年電気学会センサ・マイクロマシン部門総合研究会,
pp. MSS-14-002,
May 2014.
Official location
-
Toshifumi Konishi,
Ken Kagaya,
Daisuke Yamane,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Kazuya Masu,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
エネルギーハーベスティングデバイスの検討(3),
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
Sub-1G MEMS加速度センサの検討,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
-
Hiroyuki Ito,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
RF受信機のためのアレイ型MEMS共振器ミキサの検討,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
-
Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
エネルギーハーベスティングデバイスの検討(2),
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
-
Takaaki Matsushima,
Toshifumi Konishi,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサ-2軸MEMS加速度センサの検討-,
第61回応用物理学会春季学術講演会,
Mar. 2014.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
MEMS加速度センサによるSub-1G検出の基礎検討,
平成26年電気学会全国大会,
Mar. 2014.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi.
CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-,
電子情報通信学会 シリコン・フォトニクス研究会,
SIPH2013-99,
Oct. 2013.
Official location
-
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Satoshi Maruyama,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
集積化CMOS-MEMS加速度センサ回路の検討,
第74回応用物理学会秋季学術講演会・半導体A(MEMS、NEMSの基礎と応用:異種機能集積化),
pp. 18p-P11-3,
Sept. 2013.
-
Yusuke Shiino,
Taku Fujiwara,
Hiroyuki Ito,
Noboru Ishihara,
Hisashi Yamauchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Low-power wireless pH monitoring FM Transmitter IC with Ion Sensitive Field Effect Transistor,
電子情報通信学会2013ソサイエティ大会,
C-12-24,
Sept. 2013.
Official location
-
Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
Takaaki Matsushima,
Masafumi Tsukuda,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
エネルギーハーベストデバイスの検討(1),
第74回応用物理学会秋季学術講演会,
pp. 18p-P11-5,
Sept. 2013.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Ken Kagaya,
Masafumi Tsukuda,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサの基本特性評価,
第74回応用物理学会秋季学術講演会・半導体A(MEMS、NEMSの基礎と応用:異種機能集積化),
pp. 18p-P11-4,
Sept. 2013.
-
Masafumi Tsukuda,
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサの基礎検討,
平成25年度電気学会センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会,
pp. MSS-13-001,
Aug. 2013.
Official location
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Ken Kagaya,
Masafumi Tsukuda,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化,
応用物理学会集積化MEMS技術研究会 第4回集積化MEMS技術研究ワークショップ,
July 2013.
-
Toshifumi Konishi,
Satoshi Maruyama,
Daisuke Yamane,
Takaaki Matsushima,
Katsuyuki Machida,
Kazuya Masu,
Hiroshi Toshiyoshi.
回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築,
応用物理学会集積化MEMS技術研究会 第4回集積化MEMS技術研究ワークショップ,
July 2013.
-
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
gou motohashi,
Ken Kagaya,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサの検討,
第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化),
Mar. 2013.
-
Katsuyuki Machida,
Toshifumi Konishi,
Daisuke Yamane,
Hiroshi Toshiyoshi,
Kazuya Masu.
集積化CMOS-MEMS技術の検討,
平成25年度電気学会全国大会・シンポジウム(S24)ワイヤレス通信応用RF-MEMS技術,
Mar. 2013.
-
Yusuke Shiino,
Taku Fujiwara,
Hiroyuki Ito,
Noboru Ishihara,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Kazuya Masu.
ISFETを用いたpHモニタリング用低電力FM送信ICの検討,
電子情報通信学会2013総合大会, エレクトロニクスソサイエティ,
Mar. 2013.
-
Toshifumi Konishi,
Daisuke Yamane,
gou motohashi,
Ken Kagaya,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型MEMS加速度センサの設計,
第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化),
Mar. 2013.
-
Ken Kagaya,
Toshifumi Konishi,
Daisuke Yamane,
gou motohashi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS加速度センサのためのデバイスの評価,
第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化),
Mar. 2013.
-
Takaaki Matsushima,
Toshifumi Konishi,
gou motohashi,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS加速度センサの検討(3),
2012年秋期第73会応用物理学会学術講演会,
Sept. 2012.
Official location
-
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Daisuke Yamane,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS加速度センサの検討(4),
2012年秋期第73会応用物理学会学術講演会,
Sept. 2012.
Official location
-
Katsube Kyohei,
Youngshik Shin,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップII‐蛍光強度の細菌濃度依存性‐,
2011年秋季第72回応用物理学会学術講演会,
Aug. 2012.
Official location
-
Daisuke Yamane,
gou motohashi,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Noboru Ishihara,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
アレイ型CMOS-MEMS加速度センサの検討,
July 2012.
-
Katsube Kyohei,
Ryuhei Hayashi,
Youngshik Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Changle Wang,
Yuta Takekawa,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
集積化MEMS技術による細菌迅速診断チップの開発,
応用物理学会・集積化MEMS技術研究会主催 第3回集積化MEMS技術研究ワークショップ,
July 2012.
-
Youngshik Shin,
Katsube Kyohei,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
Fabrication of microfluidic device for the bacteria observation,
2012年春季第59 回応用物理学関係連合講演会,
Mar. 2012.
Official location
-
Katsube Kyohei,
Youngshik Shin,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップI‐細菌捕獲構造の製作‐,
2011年春季第58回応用物理学関係連合講演会,
Mar. 2012.
Official location
-
Katsube Kyohei,
Ryuhei Hayashi,
Youngshik Shin,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐,
2012年春季第59 回応用物理学関係連合講演会,
Mar. 2012.
Official location
-
Ryuhei Hayashi,
Katsube Kyohei,
Hirokazu Nakazawa,
Makoto Ishida,
Kazuaki Sawada,
Hiromu Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐,
2012年春季第59 回応用物理学関係連合講演会,
2012.
Official location
-
Toshifumi Konishi,
Tomofumi Maruyama,
Takaaki Matsushima,
Makoto Mita,
Katsuyuki Machida,
Hiroyuki Ito,
Noboru Ishihara,
Kazuya Masu,
Hiroyuki Fujita,
Hiroshi Toshiyoshi.
A Multi-physics Simulation Technique for Integrated CMOS-MEMS (2),
第 72 回応用物理学会学術講演会,
第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14,
応用物理学会,
p. 22-014,
Aug. 2011.
-
Katsube Kyohei,
Eishiki Shin,
Makoto Ishida,
Kazuaki Sawada,
Hitoshi Ishii,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu,
Kenichiro Iida,
Mitsumasa Saito,
Mitsumasa Fujii,
Shinichi Yoshida.
細菌迅速検出用マイクロチップII ‐蛍光強度の細菌濃度依存性‐,
第72 回応用物理学会学術講演会,
第72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学),
応用物理学会,
p. 22-016,
Aug. 2011.
-
Taku Fujiwara,
Noboru Ishihara,
Shuhei Amakawa,
Hisashi Yamanouchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Low-power and small wireless pH sensing module with Ion-Sensitive FET,
応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010,
応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010,
応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010,
pp. 19-22,
Oct. 2010.
-
Taku Fujiwara Noboru Ishihara Shuhei Amakawa Hisashi Yamanouchi Hiroki Tanabe Satoshi Nomura Toshifumi Konishi Katsuyuki Machida Kazuya Masu Tokyo Institute of Technology NTT Advanced Technology Corporation,
Noboru Ishihara,
Shuhei Amakawa,
Hisashi Yamauchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
Low-power wireless pH sensing FM transmitter IC with Ion Sensitive Field Effect Transistor,
2010 年電子情報通信学会エレクトロニクスソサイエティ大会,
2010 年電子情報通信学会エレクトロニクスソサイエティ大会,
2010 年電子情報通信学会エレクトロニクスソサイエティ大会,
pp. 111,
Sept. 2010.
-
Taku Fujiwara,
Noboru Ishihara,
Hisashi Yamauchi,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
ISFETを用いた生体・環境モニタリング用ワイヤレスpHセンサモジュール,
LSIとシステムのワークショップ2010,
LSIとシステムのワークショップ2010,
LSIとシステムのワークショップ2010,
May 2010.
-
Taku Fujiwara,
Noboru Ishihara,
Shuhei Amakawa,
Hiroki Tanabe,
Satoshi Nomura,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu.
pHセンサ用ISFET特性のモデリング,
2009年(平成21年)秋季第70回応用物理学会学術講演会,
2009年(平成21年)秋季第70回応用物理学会学術講演会,
応用物理学会,
8p-TB-3,
Sept. 2009.
Patent
-
Masato Sone,
Tso-Fu Mark Chang,
Chun Yi Chen,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu.
貴金属またはその合金の微細結晶組織を有する金属材料.
Patent.
Published.
国立大学法人東京工業大学.
2018/12/21.
特願2018-239826.
2020/07/02.
特開2020-100874.
2020.
-
Kazuya Masu,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito.
微細素子.
Patent.
Registered.
国立大学法人東京工業大学, エヌ・ティ・ティ・アドバンステクノロジ株式会社.
2018/05/29.
特願2018-102096.
2019/12/05.
特開2019-207133.
特許第7002732号.
2022/01/05
2022.
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